Electron interactions with plasma processing gase: An update for CF4, CHF3, C2F6, and C3F8

Journal of Physical and Chemical Reference Data

Volumn 28, Issue 4, 1999, Pages 967-982

  Christophorou, L G ^a   Olthoff, J K ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Attachment; C2F6; C3F8; CF4; CHF3; Cross sections; Dissociation; Electron interactions; Ionization; Scattering; Transport coefficients

Indexed keywords

DISSOCIATION; IONIZATION; SCATTERING;

ATTACHMENT; C2F6; C3F8; CHF3; CROSS SECTIONS; ELECTRON INTERACTION; TRANSPORT COEFFICIENT;

ELECTRON TRANSPORT PROPERTIES;

EID: 0033268821     PISSN: 00472689     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.556042     Document Type: Article

References (76)

1. L. G. Christophorou, J. K. Olthoff, and M. V. V. S. Rao, J. Phys. Chem. Ref. Data 25, 1341 (1996).
2. L. G. Christophorou, J. K. Olthoff, and M. V. V. S. Rao, J. Phys. Chem. Ref. Data 26, 1 (1997).
3. L. G. Christophorou and J. K. Olthoff, J. Phys. Chem. Ref. Data 27, 1 (1998).
4. L. G. Christophorou and J. K. Olthoff, J. Phys. Chem. Ref. Data 27, 889 (1998).
5. J. W. Au, G. R. Burton, and C. E. Brion, Chem. Phys. 221, 151 (1997).
6. W. Zhang, G. Cooper, T. Ibuki, and C. E. Brion, Chem. Phys. 137, 391 (1989).
7. L. C. Lee, E. Phillips, and D. L. Judge, J. Chem. Phys. 67, 1237 (1977).
8. D. M. Bishop, F. L. Gu, and S. M. Cybulski, J. Chem. Phys. 109, 8407 (1998).
9. R. A. Bonham and M. R. Bruce, Proceedings of the Joint Symposium on Electron and Ion Swarms and Low Energy Electron Scattering, Gold Coast, Australia, July, 1991, p. 5.
10. W. R. Harshbarger, M. B. Robin, and E. N. Lassettre, J. Electron Spectrosc. Relat. Phenom. 1, 319 (1972/73).
11. T. A. Carlson, A. Fahlman, W. A. Svensson, M. O. Krause, T. A. Whitley, F. A. Grimm, M. N. Piancastelli, and J. W. Taylor, J. Chem. Phys. 81, 3828 (1984).
12. R. L. Asher and B. Ruscic, J. Chem. Phys. 106, 210 (1997).
13. A. Hansel, Ch. Scheiring, M. Glantschning, W. Lindinger, and E. E. Ferguson, J. Chem. Phys. 109, 1748 (1998).
14. M. Tichy, G. Javahery, N. D. Twiddy, and E. E. Ferguson, Int. J. Mass Spectrom. Ion Processes 79, 231 (1987).
15. E. R. Fisher and P. B. Armentrout, Int. J. Mass Spectrom. Ion Processes 101, R1 (1990).
16. I. Powis, Mol. Phys. 39, 311 (1980).
17. G. K. Jarvis and R. P. Tuckett, Chem. Phys. Lett. 295, 145 (1998).
18. Y. J. Kime, D. C. Driscoll, and P. A. Dowben, J. Chem. Soc., Faraday Trans. 2 83, 403 (1987).
19. M. Schmidt, R. Seefeldt, and H. Deutsch, Int. J. Mass Spectrom. Ion Processes 93, 141 (1989).
20. Y. J. Kime and P. A. Dowben, J. Phys. Chem. 93, 6881 (1989).
21. G. Hagenow, W. Denzer, B. Brutschy, and H. Baumgärtel, J. Phys. Chem. 92, 6487 (1988).
22. R. K. Jones, J. Chem. Phys. 84, 813 (1986).
23. C. Szmytkowski, A. M. Krzysztofowicz, P. Janicki, and L. Rosenthal, Chem. Phys. Lett. 199, 191 (1986).
24. A. Zecca, G. P. Karwasz, and R. S. Brusa, Phys. Rev. A 46, 3877 (1992).
25. O. Sueoka, S. Mori, and A. Hamada, J. Phys. B 27, 1453 (1994).
26. O. Sueoka, H. Takaki, A. Hamada, H. Sato, and M. Kimura, Chem. Phys. Lett. 288, 124 (1998).
27. S. L. Lunt, J. Randell, J.-P. Ziesel, G. Mrotzek, and D. Field, J. Phys. B 31, 4225 (1998).
28. W. A. Isaacs, C. W. McCurdy, and T. N. Rescigno, Phys. Rev. A 58, 309 (1998).
29. M. V. V. S. Rao and S. K. Srivastava, Proceedings of the Twentieth International Conference on the Physics of Electronic and Atomic Collisions, Vienna, Austria, July 1997, Vol. II, p. MO150.
30. H. Nishimura, W. M. Huo, M. A. Ali, and Y.-K. Kim, J. Chem. Phys. 110, 3811 (1999).
31. H. U. Poll, C. Winkler, D. Margreiter, V. Grill, and T. D. Märk, Int. J. Mass Spectrom. Ion Processes 112, 1 (1992).
32. M. R. Bruce and R. A. Bonham, Int. J. Mass Spectrom. Ion Processes 123,97 (1993).
33. R. A. Bonham, Jpn. J. Appl. Phys. Part 1 33, 4157 (1994).
34. Y.-K. Kim, W. Hwang, M. A. Ali, and M. E. Rudd, Proceedings Twentieth International Conference on the Physics of Electronic and Atomic Collisions, Vienna, Austria, July 1997, Vol. II, p. WE103.
35. H. Deutsch, K. Becker, and T. D. Märk, Int. J. Mass Spectrom. Ion Processes 167/168, 503 (1997).
36. L. Mi and R. A. Bonham, J. Chem. Phys. 108, 1910 (1998).
37. S. Motlagh and J. H. Moore, J. Chem. Phys. 109, 432 (1998).
38. H. Sugai, H. Toyoda, T. Nakano, and M. Goto, Contrib. Plasma Phys. 35, 415 (1995).
39. H. F. Winters and M. Inokuti, Phys. Rev. A 25, 1420 (1982).
40. L. Boesten, H. Tanaka, A. Kobayashi, M. A. Dillon, and M. Kimura, J. Phys. B 25, 1607 (1992).
41. M.-C. Bordage, P. Ségur, L. G. Christophorou, and J. K. Olthoff, J. Appl. Phys. (in press).
42. A. V. Vasenkov, J. Appl. Phys. 85, 1222 (1999).
43. S. R. Hunter, J. G. Carter, and L. G. Christophorou, J. Chem, Phys. 86, 693 (1987).
44. M. Shimozuma, H. Tagashira, and H. Hasagawa, J. Phys. D 16, 971 (1983).
45. S. E. Božin and C. C. Goodyear, J. Phys. D 1, 327 (1968).
46. I. M. Bortnik and A. A. Panov, Sov. Phys. Tech. Phys. 16, 571 (1971).
47. M. S. Naidu and A. N. Prasad, J. Phys. D 5, 983 (1972).
48. C. S. Lakshminarasimha, J. Lucas, and D. A. Price, Proc. IEE 120, 1044 (1973).
49. C. S. Lakshminarasimha, J. Lucas, and R. A. Snelson, Proc. IEE 122, 1162 (1975).
50. Y. Hayashi and Y. Nakamura, in Proceedings of the International Conference on Atomic and Molecular Data and their Applications, NIST Special Publication 926, edited by W. L. Wiese and P. J. Mohr (U.S. Department of Commerce. Gaithersburg, MD, 1998), p. 248.
51. S. R. Hunter, J. G. Carter, and L. G. Christophorou, Phys. Rev. A 38, 58 (1988).
52. L. G. Christophorou, D. L. McCorkle, D. V. Maxey, and J. G. Carter, Nucl. Instrum. Methods 163, 141 (1979).
53. S. R. Hunter, J. G. Carter, and L. G. Christophorou, J. Appl. Phys. 58, 3001 (1985).
54. B. Schmidt and S. Polenz, Nucl. Instrum. Methods Phys. Res. A 273, 488 (1988).
55. L. G. Christophorou, Atomic and Molecular Radiation Physics (Wiley-Interscience, New York, 1971), Chap. 4.
56. J. E. Sanabia, G. D. Cooper, J. A. Tossell, and J. H. Moore, J. Chem. Phys. 108, 389 (1998).
57. A. L. McClellan, Tables of Experimental Dipole Moments (W. H. Freeman and Company, San Francisco, 1963), p. 38.
58. H. Tanaka, T. Masai, M. Kimura, T. Nishimura, and Y. Itikawa, Phys. Rev. A 56, R3338 (1997).
59. H. Tanaka (private communication, October 1998).
60. A. P. P. Natalense, M. H. F. Bettega, L. G. Ferreira, and M. A. P. Lima, Phys. Rev. A 59, 879 (1999).
61. C. Q. Jiao, R. Nagpal, and P. D. Haaland, Chem. Phys. Lett. 269, 117 (1997).
62. C. Q. Jiao (private communication, January 1999).
63. H. U. Poll and J. Meichsner, Contrib. Plasma Phys. 27, 359 (1987).
64. M. Goto, K. Nakamura, H. Toyoda, and H. Sugai, Jpn. J. Appl. Phys., Part 1 33, 3602 (1994).
65. J. A. Beran and L. Kevan, J. Phys. Chem. 73, 3866 (1969).
66. Y. Wang, L. G. Christophorou, J. K. Olthoff, and J. K. Verbrugge, in Gaseous Dielectrics VIII, edited by L. G. Christophorou and J. K. Olthoff (Plenum, New York, 1998), p. 39; Y. Wang, L. G. Christophorou, J. K. Olthoff, and J. K. Verbrugge, Chem. Phys. Lett. 304, 303 (1999).
67. Y. Wang, L. G. Christophorou, J. K. Olthoff, and J. K. Verbrugge, in Gaseous Dielectrics VIII, edited by L. G. Christophorou and J. K. Olthoff (Plenum, New York, 1998), p. 39; Y. Wang, L. G. Christophorou, J. K. Olthoff, and J. K. Verbrugge, Chem. Phys. Lett. 304, 303 (1999).
68. J. de Urquijo, E. Basurto, C. Cisneros, and I. Alvarez, Proceedings of 1999 International Conference on the Physics of Ionized Gases, Warsaw, Poland, 1999 (in press).
69. L. G. Christophorou and J. K. Olthoff, in Advances in Atomic, Molecular, and Optical Physics (in press).
70. J. D. Clark, B. W. Wright, J. D. Wrbanek, and A. Garscadden, in Gaseous Dielectrics VIII, edited by L. G. Christophorou and J. K. Olthoff (Plenum, New York, 1998), p. 23.
71. G. K. Jarvis, C. A. Mayhew, L. Singleton, and S. M. Spyrou, Int. J. Mass Spectrom. Ion Processes 164, 207 (1997).
72. H. Deutsch, K. Becker, R. Basner, M. Schmidt, and T. D. Märk, J. Phys. Chem. A 102, 8819 (1998).
73. M. V. Kurepa, 3rd Czechoslovakian Conference on Electronics and Vacuum Physics Transactions, Prague, 23-28 September 1965, pp. 107-115.
74. H. Okumo and Y. Nakamura, in Proceedings of the International Conference on Atomic and Molecular Data and Their Applications, NIST Special Publication 926, edited by W. L. Wiese and P. J. Mohr (U.S. Department of Commerce, Gaithersburg, MD, 1998), p. 265.
75. H. Tanaka, Y. Tachibana, M. Kitajima, O. Sueoka, H. Takaki, A. Hamada, and M. Kimura, Phys. Rev. A 59, 2006 (1999).
76. B.-H. Jeon and Y. Nakamura, in Proceedings of the International Conference on Atomic and Molecular Data and Their Applications, NIST Special Publication 926, edited by W. L. Wiese and P. J. Mohr (U.S. Department of Commerce, Gaithersburg, MD, 1998), p. 252.