Simulation of variations in the negative ion density in time-modulated Cl2 plasmas

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 38, Issue 7 B, 1999, Pages 4473-4477

  Yokozawa, Ayumi ^a   Samukawa, Seiji ^a  

^a NEC CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHLORINE; COMPUTER SIMULATION; DENSITY (SPECIFIC GRAVITY); ELECTRON CYCLOTRON RESONANCE; ELECTRONS; MONTE CARLO METHODS; NEGATIVE IONS; PLASMA ETCHING; PLASMA SHEATHS; POSITIVE IONS;

NEGATIVE ION DENSITY; PULSE DURATION; TIME MODULATED PLASMA;

PLASMAS;

EID: 0033157610     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.4473     Document Type: Article

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