Registration accuracy in multilevel soft lithography

Nanotechnology

Volumn 18, Issue 17, 2007, Pages

  Pagliara, Stefano ^a   Persano, Luana ^a   Camposeo, Andrea ^a   Cingolani, Roberto ^a   Pisignano, Dario ^a  

^a NATIONAL NANOTECHNOLOGY LABORATORY   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC MODULI; MATERIALS SCIENCE;

SOFT LITHOGRAPHY; STAMP MATERIALS;

NANOLITHOGRAPHY;

POLYMER;

ARTICLE; ELASTICITY; MEMBRANE POTENTIAL; PLASTICITY; PRIORITY JOURNAL; YOUNG MODULUS;

ELASTIC STRENGTH; LITHOGRAPHY; MATERIALS;

EID: 34047261855     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/18/17/175302     Document Type: Article

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