A monolithic PDMS waveguide system fabricated using soft-lithography techniques

Journal of Lightwave Technology

Volumn 23, Issue 6, 2005, Pages 2088-2093

  Chang Yen, David A ^a,b   Eich, Richard K ^a   Gale, Bruce K ^a  

^a Department of Electrical and Computer Engineering   (United States)

^b Wasatch Microfluidics Inc   (United States)

Author keywords

Micro total analysis systems; Poly(dimethyl siloxane); Soft lithography; Waveguide

Indexed keywords

ATTENUATION; ELLIPSOMETRY; LITHOGRAPHY; OPTICAL FIBER FABRICATION; RAPID PROTOTYPING; REFRACTIVE INDEX;

MICROTOTAL ANALYSIS; MONOLITHIC WAVEGUIDE; POLYDIMETHYLSILOXANE; SOFT LITHOGRAPHY;

OPTICAL WAVEGUIDES;

EID: 22444443758     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2005.849932     Document Type: Article

References (22)

1. A. Papra, A. Bernard, D. Juncker, N. B. Larsen, B. Michael, and E. Delamarche, "Microfluidic networks made of poly(dimethylsiloxane), Si, and Au coated with polyethylene glycol for patterning proteins onto surfaces," Langmuir, vol. 17, pp. 4090-4095, Jun. 2001.
2. S. L. Walker, S. Bhattacharjee, E. M. V. Hoek, and M. Elimelech, "A novel asymmetric clamping cell for measuring streaming potential of flat surfaces," Langmuir, vol. 18, pp. 2193-2198, Mar. 2002.
3. D. J. Beebe, J. S. Moore, Q. Yu, R. H. Liu, M. L. Kraft, B.-H. Jo, and C. Devadoss, "Microfluidic tectonics: a comprehensive construction platform for microfluidic systems," Proc. Nat. Academy Sci., vol. 97, pp. 13 488-13 493, Dec. 2000.
4. O. Hofmann, G. Voirin, P. Niedermann, and A. Manz, "Three-dimensional microfluidic confinement for efficient sample delivery to biosensor surfaces. Application to immunoassays on planar optical waveguides," Anal. Chem., vol. 74, pp. 5243-5250, Oct. 2002.
5. R. A. Vijayendran, K. M. Motsegood, D. J. Beebe, and D. E. Leckband, "Evaluation of three-dimensional micromixer in a surface-based biosensor," Langmuir, vol. 19, pp. 1824-1828, Mar. 2003.
6. P. A. Auroux, D. Iossifidis, D. R. Reyes, and A. Manz, "Micro total analysis systems, 2. Analytical standard operations and applications," Anal. Chem., vol. 74, pp. 2637-2652, Jun. 2002.
7. H. Chen, D. Acharya, A. Gajraj, and J.-C. Meiners, "Robust interconnects and packaging for microfluidic elastomeric chips," Anal. Chem., vol. 75, pp. 5287-5291, Oct. 2003.
8. G. S. Rajan, G. S. Sur, J. E. Mark, D. W. Schaefer, and G. Beaucage, "Preparation and application of some unusually transparent poly(dimethylsiloxane) nanocomposites," J. Polym. Sci., B, vol. 41, pp. 1897-1901, Aug. 2003.
9. D. A. Chang-Yen and B. K. Gale, "An integrated optical oxygen sensor fabricated using rapid-prototyping techniques," Lab-on-a-Chip, vol. 3, pp. 297-301, Jun. 2003.
10. K. B. Mogensen, J. El-Ali, A. Wolff, and J. P. Kutter, "Integration of polymer waveguides for optical detection in microfabricated chemical analysis systems," Appl. Opt., vol. 42, pp. 4072-4079, Jul. 2003.
11. X.-M. Zhao, S. P. Smith, S. J. Waldman, G. M. Whitesides, and M. Prentiss, "Demonstration of waveguide couplers fabricated using micro-transfer molding," Appl. Phys. Lett., vol. 71, pp. 1017-1019, Aug. 1997.
12. J.-S. Kim, J.-W. Kang, and J.-J. Kim, "Simple and low cost fabrication of thermally stable polymeric multimode waveguides using a UV-curable epoxy," Jpn. J. Appl. Phys., vol. 42, pp. 1277-1279, Mar. 2003.
13. A. Borreman, S. Musa, A. A. M. Kok, M. B. J. Diemeer, and A. Driessen, "Fabrication of polymeric multimode waveguides and devices in SU-8 photoresist using selective polymerization," in Proc. 2002 Symp. IEEE/LEOS Benelux Chapter, 2002, pp. 83-86.
14. Y. Ansel, D. Grau, and M. Holzki, "Assembly of optical fibers for the connection of polymer-based waveguide," in Proc. SPIE, vol. 4947, 2003, pp. 102-112.
15. C.-H. Lin, G.-B. Lee, S.-H. Chen, and G.-L. Chang, "Micro capillary electrophoresis chips integrated with buried SU-8/SOG optical waveguides for bio-analytical applications," Sens. Actuators A, Phys., vol. 107, pp. 125-131, Oct. 2003.
16. P. Thiébaud, L. Lauer, W. Knoll, and A. Offenhäusser, "PDMS device for patterned application of microfluids to neuronal cells arranged by microcontact printing," Biosens. Bioelec., vol. 17, pp. 87-93, Jan. 2002.
17. J. R. Anderson, D. T. Chiu, R. J. Jackman, O. Cherniavskaya, J. C. McDonald, H. Wu, S. H. Whitesides, and G. M. Whitesides, "Fabrication of topologically complex three-dimensional microfluidic systems in PDMS by rapid prototyping," Anal. Chem., vol. 72, pp. 3158-3164, Jul. 2000.
18. R. G. Hunsperger, Integrated Optics: Theory and Technology, ser. Springer Series in Optical Sciences. Berlin, Heidelberg, GDR: Springer-Verlag, 1982, vol. 33, pp. 16-42.
19. D. K. Mynbaev and L. L. Scheiner, Fiber-Optic Communications Technology. Englewood Cliffs, NJ: Prentice-Hall, 2001, pp. 54-55.
20. H. C. Hillborg, Loss and Recovery of Hydrophobicity of Polydimethylsiloxane After Exposure to Electrical Discharges. Solna, Sweden: Nykopia Global Print AB, 2001, pp. 13-15.
21. S. D. Gillmor, B. J. Larson, J. M. Braun, C. E. Mason, L. E. Cruz-Barba, F. Denes, and M. G. Lagally, "Low-contact-angle polydimethyl siloxane (PDMS) membranes for fabricating micro-bioarrays," in Proc. 2nd Annu. Int. IEEE-EMBS Special Topic Conf. Microtechnologies Medicine Biology, 2002, pp. 51-56.
22. E. Delamarche, C. Donzel, F. S. Kamounah, H. Wolf, M. Geissler, R. Stutz, P. Schmidt-Winkel, B. Michel, H. J. Mathieu, and K. Schaumburg, "Microcontact printing using poly(dimethylsiloxane) hydrophilized by poly(ethylene oxide) silanes," Langmuir, vol. 19, pp. 8749-8758. Oct. 2003.