Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography

Applied Physics Letters

Volumn 76, Issue 6, 2000, Pages 673-675

  Li, Mingtao ^a   Wang, Jian ^a   Zhuang, Lei ^a   Chou, Stephen Y ^a  

^a Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000903445     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.125896     Document Type: Article

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