Diffracted moiŕ fringes as analysis and alignment tools for multilayer fabrication in soft lithography

Applied Physics Letters

Volumn 86, Issue 20, 2005, Pages 1-3

  Lee, Jae Hwang ^a   Kim, Chang Hwan ^a   Kim, Yong Sung ^a   Ho, Kai Ming ^a   Constant, Kristen ^b   Leung, Wai ^a   Oh, Cha Hwan ^c  

^a IOWA STATE UNIVERSITY   (United States)

^b Iowa State University of Science and Technology   (United States)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTED MOIRÉ FRINGES (DMF); MICROTRANSFER MOLDING (ΜTM); MULTILAYER FABRICATION; POLY DIMETHYLSILOXANE (PDMS); SOFT LITHOGRAPHY;

DIFFRACTION GRATINGS; ELASTOMERS; ELECTRON DIFFRACTION; FABRICATION; LITHOGRAPHY; MICROSTRUCTURE; MOS DEVICES; OPTICAL CORRELATION; PATTERN MATCHING; SCANNING ELECTRON MICROSCOPY; SILICONES;

MOIRE FRINGES;

EID: 20844440030     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1927268     Document Type: Article

References (15)

1. Y. Xia and G. M. Whitesides, Angew. Chem., Int. Ed. Engl. 37, 550 (1998).
2. S. Y. Lin, J. G. Fleming, D. L. Hetherington, B. K. Smith, R. Biswas, K. M. Ho, M. M. Sigalas, W. Zubrzycki, S. R. Kurtz, and Jim Bur, Nature (London) 394, 251 (1998).
3. M. A. Burns, B. N. Johnson, S. N. Brahmasandra, K. Handique, J. R. Webster, M. Krishnan, T. S. Sammarco, P. M. Man, D. Jones, D. Heldsinger, C. H. Mastrangelo, and D. T. Burke, Science 282, 484 (1998).
4. J. Park and P. T. Hammond, Adv. Mater. (Weinheim, Ger.) 16, 520 (2004).
5. T. Thorsen, S. J. Maerkl, and S. R. Quake, Science 298, 580 (2002).
6. T. Nomura, S. Kimura, Y. Uchida, and S. Hattori, J. Vac. Sci. Technol. B 6, 394 (1988).
7. H. Zhou, M. Feldman, and R. Bass, J. Vac. Sci. Technol. B 12, 3261 (1994).
8. J. A. Rogers, K. E. Paul, and G. M. Whitesides, J. Vac. Sci. Technol. B 16, 88 (1998).
9. H. Schmid and B. Michel, Macromolecules 33, 3042 (2000).
10. X. M. Zhao, Y. Xia, and G. M. Whitesides, Adv. Mater. (Weinheim, Ger.) 8, 837 (1996).
11. O. Kafri and I. Glatt, The Physics of Moiŕ Metrology (Wiley-Interscience, New York, 1990), Chap..
12. B. Han, in Handbook of Moiŕ Measurement, edited by, C. A. Walker, (Institute of Physics, Bristol, 2004), Chap., pp. 18-24.
13. N. Yamamoto and S. Noda, Jpn. J. Appl. Phys., Part 1 37, 3334 (1998).
14. Publication No. 10-042D-98, Dow Corning, Midland, MI.
15. The value of the refractive index was acquired from Summers Optical (www.emsdiasum.com).