Combined capillary force and step and flash lithography

Nanotechnology

Volumn 16, Issue 4, 2005, Pages 391-395

  Mele, Elisa ^a   Di Benedetto, Francesca ^a   Persano, Luana ^a   Pisignano, Dario ^a   Cingolani, Roberto ^a  

^a INFM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; CAPILLARY FLOW; ELASTOMERS; POLYMERIZATION; THROUGHPUT;

FLASH LITHOGRAPHY; IN SITU POLYMERIZATION; SOFT LITHOGRAPHY; STEP LITHOGRAPHY;

LITHOGRAPHY;

EID: 24144439051     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/16/4/010     Document Type: Article

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