Estimation of optimum density and temperature for maximum efficiency of tin ions in Z discharge extreme ultraviolet sources

Journal of Applied Physics

Volumn 101, Issue 3, 2007, Pages

  Masnavi, Majid ^a   Nakajima, Mitsuo ^a   Hotta, Eiki ^a   Horioka, Kazuhiko ^a   Niimi, Gohta ^b   Sasaki, Akira ^c  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b Gotenba Division   (Japan)

^c JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; ELECTRON DENSITY MEASUREMENT; IONS; MATHEMATICAL MODELS; PLASMAS; THERMAL EFFECTS;

LIVERMORE ATOMIC CODE; RADIATIVE TRANSFER; SPECTRAL EFFICIENCY;

ULTRAVIOLET LAMPS;

EID: 33847124398     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2434987     Document Type: Article

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