-
2
-
-
0033684545
-
-
PSISDG 0277-786X
-
W. N. Partlo, I. V. Fomenkov, R. Oliver, and D. L. Birx, Proc. SPIE PSISDG 0277-786X 3997, 136 (2000).
-
(2000)
Proc. SPIE
, vol.3997
, pp. 136
-
-
Partlo, W.N.1
Fomenkov, I.V.2
Oliver, R.3
Birx, D.L.4
-
3
-
-
84856121745
-
-
PSISDG. 0277-786X
-
V. M. Borisov, I. Ahmad, S. Götze, A. S. Ivanov, O. B. Khristoforov, J. Kleinschmidt, V. Korobotchko, J. Ringling, G. Schriever, U. Stamm, and A. Y. Vinokhodov, Proc. SPIE PSISDG 0277-786X 4688, 627 (2002).
-
(2002)
Proc. SPIE
, vol.4688
, pp. 627
-
-
Borisov, V.M.1
Ahmad, I.2
Götze, S.3
Ivanov, A.S.4
Khristoforov, O.B.5
Kleinschmidt, J.6
Korobotchko, V.7
Ringling, J.8
Schriever, G.9
Stamm, U.10
Vinokhodov, A.Y.11
-
4
-
-
85010119652
-
-
APOPAI 0003-6935
-
M. McGeoch, Appl. Opt. APOPAI 0003-6935 37, 1651 (1998).
-
(1998)
Appl. Opt.
, vol.37
, pp. 1651
-
-
McGeoch, M.1
-
5
-
-
84856122843
-
-
edited by V. Bakshi
-
M. McGeoch and C. Pike, in Proceedings of the EUV Source Work-shop, International SEMATECH, Dallas, TX, 2002, edited by, V. Bakshi, http://www.sematech.org/resources/litho/meetings/euvl/20021014/10-PLEXLLC.pdf.
-
Proceedings of the EUV Source Work-shop, International SEMATECH, Dallas, TX, 2002
-
-
McGeoch, M.1
Pike, C.2
-
6
-
-
0032614398
-
-
APOPAI. 0003-6935
-
K. Bergmann, G. Schriever, O. Rosier, M. Müller, W. Neff, and R. Lebert, Appl. Opt. APOPAI 0003-6935 38, 5413 (1999).
-
(1999)
Appl. Opt.
, vol.38
, pp. 5413
-
-
Bergmann, K.1
Schriever, G.2
Rosier, O.3
Müller, M.4
Neff, W.5
Lebert, R.6
-
7
-
-
10644222785
-
-
JPAPBE 0022-3727 10.1088/0022-3727/37/23/008
-
M. McGeoch, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/37/23/008 37, 3277 (2004).
-
(2004)
J. Phys. D
, vol.37
, pp. 3277
-
-
McGeoch, M.1
-
8
-
-
10644258117
-
-
JPAPBE 0022-3727 10.1088/0022-3727/37/23/005
-
U. Stamm, J. Phys. D JPAPBE 0022-3727 10.1088/0022-3727/37/23/005 37, 3244 (2004).
-
(2004)
J. Phys. D
, vol.37
, pp. 3244
-
-
Stamm, U.1
-
9
-
-
27244446996
-
-
Proceedings of the 3rd International EUVL Symposium, Miyazaki, Japan, edited by V. Bakshi (Sematech, Austin,TX
-
Proceedings of the 3rd International EUVL Symposium, Miyazaki, Japan, edited by, V. Bakshi, (Sematech, Austin,TX, 2004).
-
(2004)
-
-
-
10
-
-
41349085634
-
-
PLEEE8 1063-651X 10.1103/PhysRevE.71.026409
-
E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, V. Banine, and K. N. Koshelev, Phys. Rev. E PLEEE8 1063-651X 10.1103/PhysRevE.71.026409 71, 026409 (2005).
-
(2005)
Phys. Rev. E
, vol.71
, pp. 026409
-
-
Kieft, E.R.1
Van Der Mullen, J.J.A.M.2
Kroesen, G.M.W.3
Banine, V.4
Koshelev, K.N.5
-
11
-
-
37649027466
-
-
PLEEE8 1063-651X 10.1103/PhysRevE.70.066402
-
E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, V. Banine, and K. N. Koshelev, Phys. Rev. E PLEEE8 1063-651X 10.1103/PhysRevE.70.066402 70, 066402 (2004).
-
(2004)
Phys. Rev. E
, vol.70
, pp. 066402
-
-
Kieft, E.R.1
Van Der Mullen, J.J.A.M.2
Kroesen, G.M.W.3
Banine, V.4
Koshelev, K.N.5
-
12
-
-
37649028878
-
-
PLEEE8 1063-651X 10.1103/PhysRevE.70.056413
-
E. R. Kieft, J. J. A. M. van der Mullen, G. M. W. Kroesen, V. Banine, and K. N. Koshelev, Phys. Rev. E PLEEE8 1063-651X 10.1103/PhysRevE.70.056413 70, 056413 (2004).
-
(2004)
Phys. Rev. E
, vol.70
, pp. 056413
-
-
Kieft, E.R.1
Van Der Mullen, J.J.A.M.2
Kroesen, G.M.W.3
Banine, V.4
Koshelev, K.N.5
-
14
-
-
1942478948
-
-
PHRVAO 0031-899X 10.1103/PhysRev.120.1528
-
E. E. Salpeter, Phys. Rev. PHRVAO 0031-899X 10.1103/PhysRev.120.1528 120, 1528 (1960).
-
(1960)
Phys. Rev.
, vol.120
, pp. 1528
-
-
Salpeter, E.E.1
-
15
-
-
27244459120
-
-
Ph.D. thesis, Eindhoven University of Technology
-
M. J. van de Sande, Ph.D. thesis, Eindhoven University of Technology, 2002, http://alexandria.tue.nl/extra2/200210414.pdf
-
(2002)
-
-
Van De Sande, M.J.1
|