Analyses of the Sn IX-Sn XII spectra in the EUV region

Physica Scripta

Volumn 73, Issue 6, 2006, Pages 614-619

  Churilov, S S ^a   Ryabtsev, A N ^a  

^a INSTITUTE OF SPECTROSCOPY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; ELECTRON ENERGY LEVELS; EXTRAPOLATION; LITHOGRAPHY; SPECTRUM ANALYSIS; ULTRAVIOLET RADIATION;

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY; SN IX-SN XII SPECTRA; TRANSITION ARRAYS;

TIN COMPOUNDS;

EID: 33745481331     PISSN: 00318949     EISSN: 14024896     Source Type: Journal    
DOI: 10.1088/0031-8949/73/6/014     Document Type: Article

References (17)

1. Svendsen W and O'Sullivan G 1994 Phys. Rev. A 50 3710
2. Seglio N M, Hawryluk A M, Stearns D G, Gaines D P, Rosen R S and Vernon S P 1990 J. Vac. Sci. Technol. B 8 1325
3. Soufli R and Gullikson E M 1997 Proc. SPIE 3113 222
4. Sugar J, Kaufman V and Rowan W L 1992 J. Opt. Soc. Am. B 9 1959
5. Churilov S S and Ryabtsev A N 2006 Opt. Spectrosc. 100 729
6. Cowan R D 1981 The Theory of Atomic Structure and Spectra (Berkeley, CA: University of California Press) The Cowan code is available at Web site http://das101.isan.troitsk.ru, where a version modified for PC by Ralchenko and Kramida can be found
7. Svensson L A and Ekberg J O 1969 Ark. Fys. 40 145
8. Joshi Y N, Raassen A J J, van Kleef Th A M and van der Valk A A 1988 Phys. Scr. 38 677
9. Raassen A J J and van Kleef Th A M 1987 Physica C 146 423
10. Sugar J and Musgrove A 1988 J. Phys. Chem. Ref. Data 17 155
11. Joshi Y N and van Kleef Th A M 1977 Can. J. Phys. 55 714
12. Churilov S S, Kildyarova R R, Ryabtsev A N, Kramida A E and Joshi Y N 1994 Phys. Scr. 50 463
13. Joshi Y N and van het Hof G J 1993 Phys. Scr. 48 714
14. Azarov V I, Joshi Y N, Churilov S S and Ryabtsev A N 1994 Phys. Scr. 50 642
15. Azarov V I and Joshi Y N 1993 J. Phys. B: At. Mol. Opt. Phys. 26 3495
16. Churilov S S and Ryabtsev A N 2006 Opt. Spectrosc. 100 at press
17. Azarov V I 1993 Phys. Scr. 48 656