Narrowband laser produced extreme ultraviolet sources adapted to silicon/molybdenum multilayer optics

Journal of Applied Physics

Volumn 83, Issue 9, 1998, Pages 4566-4571

  Schriever, G ^a   Bergmann, K ^a   Lebert, R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000148210     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.367238     Document Type: Article

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