Extreme ultraviolet emission spectra of highly ionized xenon and their comparison with model calculations

Journal of Applied Physics

Volumn 95, Issue 1, 2004, Pages 16-23

  Bowering N ^a   Martins, M ^b   Partlo, W N ^a   Fomenkov, I V ^a  

^a CYMER INC   (United States)

^b UNIVERSITY OF HAMBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CHARGE COUPLED DEVICES; GEOMETRICAL OPTICS; PLASMAS; SPECTROMETERS; TEMPERATURE; ULTRAVIOLET RADIATION;

ELECTRON TEMPERATURE; EXTREME ULTRAVIOLET EMISSION SPECTRA; EXTREME ULTRAVIOLET LITHOGRAPHY; HARTREE-FOCK APPROXIMATION; LOCAL THERMAL EQUILIBRATION; PLASMA FOCUS DISCHARGE; PLASMA OPACITY EFFECTS;

XENON;

EID: 0942268376     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1629153     Document Type: Article

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