Potential of discharge-based lithium plasma as an extreme ultraviolet source

Applied Physics Letters

Volumn 89, Issue 3, 2006, Pages

  Masnavi, Majid ^a   Nakajima, Mitsuo ^a   Sasaki, Akira ^b   Hotta, Eiki ^a   Horioka, Kazuhiko ^a  

^a TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^b JAPAN ATOMIC ENERGY AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONS; HYDROGEN; IONS; LITHIUM; MATHEMATICAL MODELS;

EUV LITHOGRAPHY; EXTREME ULTRAVIOLET (EUV) DISCHARGE-BASED LAMPS; Z DISCHARGE-BASED PLASMA;

ULTRAVIOLET LAMPS;

EID: 33746272191     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2227560     Document Type: Article

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