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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 12, 2004, Pages 8285-8291

Characteristics of extreme ultraviolet radiation conversion efficiency of xenon plasma

(5) Masnavi, Majid a Nakajima, Mitsuo a Sasaki, Akira b Hotta, Eiki a Horioka, Kazuhiko a

Author keywords

Capillary discharge; Conversion efficiency; EUV source; Extreme ultraviolet lithography; Ionization dynamics; Opacity broadening; Spectral brightness

Indexed keywords

CAPILLARITY; CARRIER CONCENTRATION; DOPPLER EFFECT; HEAT TREATMENT; IONIZATION; LITHOGRAPHY; OPACITY; ULTRAVIOLET RADIATION; VACUUM APPLICATIONS; XENON;

CAPILLARY DISCHARGE; CONVERSION EFFICIENCY; EUV SOURCE; EXTREME-ULTRAVIOLET LITHOGRAPHY; IONIZATION DYNAMICS; OPACITY BROADENING; SPECTRAL BRIGHTNESS;

PLASMAS;

EID: 13644276597 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/JJAP.43.8285 Document Type: Article

Times cited : (6)

References (54)

1
- 0027804449
- C. Cerjan: Appl. Opt. 32 (1993) 6911.
- (1993) Appl. Opt. , vol.32 , pp. 6911
- Cerjan, C.¹

2
- 0042010095
- F. Gilleron, M. Poirier, T. Blenski, M. Schmidt and T. Ceccotti: J. Appl. Phys. 94 (2003) 2086.
- (2003) J. Appl. Phys. , vol.94 , pp. 2086
- Gilleron, F.¹ Poirier, M.² Blenski, T.³ Schmidt, M.⁴ Ceccotti, T.⁵

3
- 0345303561
- A. Sasaki: J. Plasma Fusion Res. 79 (2003) 315.
- (2003) J. Plasma Fusion Res. , vol.79 , pp. 315
- Sasaki, A.¹

4
- 13644282212
- H. Yoneda: J. Plasma Fusion Res. 29 (2003) 226.
- (2003) J. Plasma Fusion Res. , vol.29 , pp. 226
- Yoneda, H.¹

5
- 0042427648
- S. Churilov, Y. N. Joshi and J. Reader: Opt. Lett. 28 (2003) 1478.
- (2003) Opt. Lett. , vol.28 , pp. 1478
- Churilov, S.¹ Joshi, Y.N.² Reader, J.³

6
- 0032653189
- W. T. Silfvast: IEEE J. Quantum Electron. 35 (1999) 700.
- (1999) IEEE J. Quantum Electron. , vol.35 , pp. 700
- Silfvast, W.T.¹

7
- 0037034163
- L. Juschkin, A. Chuvatin, S. V. Zakharov, S. Ellwi and H. J. Kunze: J. Phys. D 35 (2002) 219.
- (2002) J. Phys. D , vol.35 , pp. 219
- Juschkin, L.¹ Chuvatin, A.² Zakharov, S.V.³ Ellwi, S.⁴ Kunze, H.J.⁵

8
- 0036643689
- G. Schriever, U. Stamm, K. Gabel, M. Darscht, V. Borisov, O. Khristoforov and A. Vinokhodov: Microelectron. Eng. 61-62 (2002) 83.
- (2002) Microelectron. Eng. , vol.61-62 , pp. 83
- Schriever, G.¹ Stamm, U.² Gabel, K.³ Darscht, M.⁴ Borisov, V.⁵ Khristoforov, O.⁶ Vinokhodov, A.⁷

9
- 0032614398
- K. Bergmann, G. Schriever, O. Rosier, M. Muller, W. Neff and R. Lebert: Appl. Opt. 38 (1999) 5413.
- (1999) Appl. Opt. , vol.38 , pp. 5413
- Bergmann, K.¹ Schriever, G.² Rosier, O.³ Muller, M.⁴ Neff, W.⁵ Lebert, R.⁶

10
- 85010119652
- M. McGeoch: Appl. Opt. 37 (1998) 1651.
- (1998) Appl. Opt. , vol.37 , pp. 1651
- McGeoch, M.¹

11
- 0346709291
- V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, S. V. Mironov, V. A. Mishchenko, A. V. Prokofev and O. B. Khristoforov: Fiz. Plazmy 28 (2002) 952 [Plasma Phys. Rep. 28 (2002) 887].
- (2002) Fiz. Plazmy , vol.28 , pp. 952
- Borisov, V.M.¹ Vinokhodov, A.Yu.² Ivanov, A.S.³ Kiryukhin, Yu.B.⁴ Mironov, S.V.⁵ Mishchenko, V.A.⁶ Prokofev, A.V.⁷ Khristoforov, O.B.⁸

12
- 0036869321
- V. M. Borisov, A. Yu. Vinokhodov, A. S. Ivanov, Yu. B. Kiryukhin, S. V. Mironov, V. A. Mishchenko, A. V. Prokofev and O. B. Khristoforov: Fiz. Plazmy 28 (2002) 952 [Plasma Phys. Rep. 28 (2002) 887].
- (2002) Plasma Phys. Rep. , vol.28 , pp. 887

13
- 0345015541
- J. M. Pouvesle, E. Robert, T. Gothiez, R. Viladrosa, J. Pons, O. Sarroukh, M. Idrissi, B. Metay, S. R. Mohanty, C. Fleurier and C. Cachoncinlle: Plasma Sources Sci. Technol. 12 (2003) S43.
- (2003) Plasma Sources Sci. Technol. , vol.12
- Pouvesle, J.M.¹ Robert, E.² Gothiez, T.³ Viladrosa, R.⁴ Pons, J.⁵ Sarroukh, O.⁶ Idrissi, M.⁷ Metay, B.⁸ Mohanty, S.R.⁹ Fleurier, C.¹⁰ Cachoncinlle, C.¹¹

14
- 0141501438
- J. Pankert, K. Bergmann, J. Klein, W. Neff, O. Rosier, S. Seiwert, C. Smith, S. Probst, D. Vaudrevange, G. Siemens, R. Apetz, J. Jonkers, M. Lokeken, E. Bosch, G. Derra, T. Krücken and R. Zink: Proc. SPIE 5037(2003) 112.
- (2003) Proc. SPIE , vol.5037 , pp. 112
- Pankert, J.¹ Bergmann, K.² Klein, J.³ Neff, W.⁴ Rosier, O.⁵ Seiwert, S.⁶ Smith, C.⁷ Probst, S.⁸ Vaudrevange, D.⁹ Siemens, G.¹⁰ Apetz, R.¹¹ Jonkers, J.¹² Lokeken, M.¹³ Bosch, E.¹⁴ Derra, G.¹⁵ Krücken, T.¹⁶ Zink, R.¹⁷

15
- 0034755489
- R. Lebert, K. Bergmann, L. Juschkin, O. Rosier and W. Neff: Proc. SPIE 4343 (2001) 215.
- (2001) Proc. SPIE , vol.4343 , pp. 215
- Lebert, R.¹ Bergmann, K.² Juschkin, L.³ Rosier, O.⁴ Neff, W.⁵

16
- 0942289320
- E. R. Kieft, J. J. A. M. van der Mullen and G. M. W. Kroesen: Phys. Rev. E 68 (2003) 056403.
- (2003) Phys. Rev. E , vol.68 , pp. 056403
- Kieft, E.R.¹ Van Der Mullen, J.J.A.M.² Kroesen, G.M.W.³

17
- 0942268376
- N. Bowering, M. Martins, W. N. Partlo and V. Fomenkov: J. Appl. Phys. 95 (2004) 16.
- (2004) J. Appl. Phys. , vol.95 , pp. 16
- Bowering, N.¹ Martins, M.² Partlo, W.N.³ Fomenkov, V.⁴

18
- 0942289220
- H. Komori, T. Abe, T. Suganuma, Y. Imai, Y. Sugimoto, H. Someya, H. Hoshino, G. Soumagne, Y. Takabayashi, H. Mizoguchi, A. Endo, K. Toyoda and Y. Horiike: J. Vac. Sci. & Technol. B 21 (2003) 2843.
- (2003) J. Vac. Sci. & Technol. B , vol.21 , pp. 2843
- Komori, H.¹ Abe, T.² Suganuma, T.³ Imai, Y.⁴ Sugimoto, Y.⁵ Someya, H.⁶ Hoshino, H.⁷ Soumagne, G.⁸ Takabayashi, Y.⁹ Mizoguchi, H.¹⁰ Endo, A.¹¹ Toyoda, K.¹² Horiike, Y.¹³

19
- 0034738987
- T. Ito and S. Okazaki: Nature 406 (2000) 1027.
- (2000) Nature , vol.406 , pp. 1027
- Ito, T.¹ Okazaki, S.²

20
- 0035729663
- W. Neff, K. Bergmann, O. Rosier, R. Lebert and L. Juschkin: Contrib. Plasma Phys. 41 (2001) 589.
- (2001) Contrib. Plasma Phys. , vol.41 , pp. 589
- Neff, W.¹ Bergmann, K.² Rosier, O.³ Lebert, R.⁴ Juschkin, L.⁵

21
- 0742310734
- S. Eliezer, R. Falquina and E. Minguez: Phys. Rev. E 49 (1994) 4735.
- (1994) Phys. Rev. E , vol.49 , pp. 4735
- Eliezer, S.¹ Falquina, R.² Minguez, E.³

22
- 0003098771
- M. Busquet: J. Quant. Spectrosc. Radiat. Transf. 58 (1997) 519.
- (1997) J. Quant. Spectrosc. Radiat. Transf. , vol.58 , pp. 519
- Busquet, M.¹

23
- 0346010970
- V. I. Gervids, V. I. Kogan and D. Kh. Morozov: Fiz. Plazmy 27 (2001) 994 [Plasma Phys. Rep. 27 (2001) 938].
- (2001) Fiz. Plazmy , vol.27 , pp. 994
- Gervids, V.I.¹ Kogan, V.I.² Morozov, D.Kh.³

24
- 0035600726
- V. I. Gervids, V. I. Kogan and D. Kh. Morozov: Fiz. Plazmy 27 (2001) 994 [Plasma Phys. Rep. 27 (2001) 938].
- (2001) Plasma Phys. Rep. , vol.27 , pp. 938

25
- 13644279767
- M. Masnavi, M. Nakajima and K. Horioka: J. Plasma Fusion Res. 79 (2003) 1188.
- (2003) J. Plasma Fusion Res. , vol.79 , pp. 1188
- Masnavi, M.¹ Nakajima, M.² Horioka, K.³

26
- 0035887551
- A. Bar-Shalom, M. Klapisch and J. Oreg: J. Quant. Spectrosc. Radiat. Transf. 71 (2001) 169.
- (2001) J. Quant. Spectrosc. Radiat. Transf. , vol.71 , pp. 169
- Bar-Shalom, A.¹ Klapisch, M.² Oreg, J.³

27
- 13644282211
- eds., M. N. Rosenbluth and R. Z. Sagdeev (North-Holland, Amsterdam)
- H. R. Griem: Handbook of Plasma Physics, eds., M. N. Rosenbluth and R. Z. Sagdeev (North-Holland, Amsterdam, 1983) p. 73.
- (1983) Handbook of Plasma Physics , pp. 73
- Griem, H.R.¹

28
- 13644276355
- eds., Vernon W. Hughes and Howard L. Schultz (Academic Press, New York)
- W. Raith, R. L. Christensen and I. Ames: Methods of Experimental Physics, eds., Vernon W. Hughes and Howard L. Schultz (Academic Press, New York, 1967) Vol. 4, p. 284.
- (1967) Methods of Experimental Physics , vol.4 , pp. 284
- Raith, W.¹ Christensen, R.L.² Ames, I.³

29
- 0000148210
- G. Schriever, K. Bergmann and R. Lebert: J. Appl. Phys. 83 (1998) 4566.
- (1998) J. Appl. Phys. , vol.83 , pp. 4566
- Schriever, G.¹ Bergmann, K.² Lebert, R.³

30
- 0031095748
- and references therein
- K. Bergmann, R. Lebert and W. Neff: J. Phys. D 30 (1997) 990, and references therein.
- (1997) J. Phys. D , vol.30 , pp. 990
- Bergmann, K.¹ Lebert, R.² Neff, W.³

31
- 0040347837
- S. O. Kastner and A. K. Bhatia: J. Quant. Spectrosc. Radiat. Transf. 58 (1997) 217.
- (1997) J. Quant. Spectrosc. Radiat. Transf. , vol.58 , pp. 217
- Kastner, S.O.¹ Bhatia, A.K.²

32
- 13644282709
- eds. R. H. Huddelstone and S. I. Leonard (Academic Press, New York)
- R. W. P. McWhirter: Plasma Diagnostic Techniques, eds. R. H. Huddelstone and S. I. Leonard (Academic Press, New York, 1965) p. 230.
- (1965) Plasma Diagnostic Techniques , pp. 230
- McWhirter, R.W.P.¹

33
- 0004290625
- Academic Press, San Diego
- R. C. Elton: X-Ray Lasers (Academic Press, San Diego, 1990) p. 26.
- (1990) X-ray Lasers , pp. 26
- Elton, R.C.¹

34
- 0037086769
- S. J. Pestehe and G. J. Tallents: J. Quant. Spectrosc. Radiat. Transf. 72 (2002) 853.
- (2002) J. Quant. Spectrosc. Radiat. Transf. , vol.72 , pp. 853
- Pestehe, S.J.¹ Tallents, G.J.²

35
- 0009681918
- A. C. Kolb and R. W. P. McWhirter: Phys. Fluids 7 (1964) 519.
- (1964) Phys. Fluids , vol.7 , pp. 519
- Kolb, A.C.¹ McWhirter, R.W.P.²

36
- 0001619525
- R. M. More: J. Quant. Spectrosc. Radiat. Transf. 27 (1982) 345.
- (1982) J. Quant. Spectrosc. Radiat. Transf. , vol.27 , pp. 345
- More, R.M.¹

37
- 0012520503
- A. Dasgupta and K. G. Whitney: Phys. Rev. A 42 (1990) 2640.
- (1990) Phys. Rev. A , vol.42 , pp. 2640
- Dasgupta, A.¹ Whitney, K.G.²

38
- 0028312754
- K. Eidmann: Laser Part. Beams 12 (1994) 223.
- (1994) Laser Part. Beams , vol.12 , pp. 223
- Eidmann, K.¹

39
- 0029734256
- G. P. Gupta and B. K. Sinha: J. Appl. Phys. 79 (1996) 619.
- (1996) J. Appl. Phys. , vol.79 , pp. 619
- Gupta, G.P.¹ Sinha, B.K.²

40
- 0043068050
- and references therein
- A. Sasaki and T. Kawachi: J. Quant. Spectrosc. Radiat. Transf. 81 (2003) 411, and references therein.
- (2003) J. Quant. Spectrosc. Radiat. Transf. , vol.81 , pp. 411
- Sasaki, A.¹ Kawachi, T.²

41
- 18644369604
- M. Masnavi, T. Kikuchi, M. Nakajima and K. Horioka: J. Appl. Phys. 92 (2002) 3480.
- (2002) J. Appl. Phys. , vol.92 , pp. 3480
- Masnavi, M.¹ Kikuchi, T.² Nakajima, M.³ Horioka, K.⁴

42
- 0003611313
- Plenum, New York
- M. A. Bramson: Infrared Radiation, A Handbook for Applications (Plenum, New York, 1968) p. 68.
- (1968) Infrared Radiation, a Handbook for Applications , pp. 68
- Bramson, M.A.¹

43
- 0003824376
- Academic Press, New York
- Ya. B. Zel'dovich and Yu. P. Raizer: Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena (Academic Press, New York, 1966) Vol. I.
- (1966) Physics of Shock Waves and High-Temperature Hydrodynamic Phenomena , vol.1
- Zel'dovich, Yu.B.¹ Raizer, Yu.P.²

44
- 0001419429
- R. Lebert, W. Neff and D. Rothweiler: J. X-Ray Sci. & Technol. 6 (1996) 107.
- (1996) J. X-ray Sci. & Technol. , vol.6 , pp. 107
- Lebert, R.¹ Neff, W.² Rothweiler, D.³

45
- 0345886109
- and references therein
- G. P. Gupta and B. K. Sinha: Phys. Rev. E 56 (1997) 2104, and references therein.
- (1997) Phys. Rev. E , vol.56 , pp. 2104
- Gupta, G.P.¹ Sinha, B.K.²

46
- 0031124098
- T. Hosokai, M. Nakajima, T. Aoki, M. Ogawa and K. Horioka: Jpn. J. Appl. Phys. 36 (1997) 2327.
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 2327
- Hosokai, T.¹ Nakajima, M.² Aoki, T.³ Ogawa, M.⁴ Horioka, K.⁵

47
- 0000330006
- K. T. Lee, S. H. Kim, D. Kim and T. N. Lee: Phys. Plasmas 3 (1996) 1340.
- (1996) Phys. Plasmas , vol.3 , pp. 1340
- Lee, K.T.¹ Kim, S.H.² Kim, D.³ Lee, T.N.⁴

48
- 0003693893
- McGraw-Hill, New York
- N. A. Krall and A. W. Trivelpiece: Principles of Plasma Physics (McGraw-Hill, New York, 1973) p. 121.
- (1973) Principles of Plasma Physics , pp. 121
- Krall, N.A.¹ Trivelpiece, A.W.²

49
- 0017983847
- D. Potter: Nucl. Fusion 18 (1978) 813.
- (1978) Nucl. Fusion , vol.18 , pp. 813
- Potter, D.¹

50
- 13644273467
- M. K. Matzen and J. S. Pearlman: Phys. Fluids 22 (1979) 566.
- (1979) Phys. Fluids , vol.22 , pp. 566
- Matzen, M.K.¹ Pearlman, J.S.²

51
- 0742320705
- M. Masnavi, M. Nakajima and K. Horioka: J. Appl. Phys. 95 (2004) 434.
- (2004) J. Appl. Phys. , vol.95 , pp. 434
- Masnavi, M.¹ Nakajima, M.² Horioka, K.³

52
- 0020832081
- and references therein
- J. Blackburn, P. K. Carroll, J. Castello and G. O'Sullivan: J. Opt. Soc. Am. 73 (1983) 1325, and references therein.
- (1983) J. Opt. Soc. Am. , vol.73 , pp. 1325
- Blackburn, J.¹ Carroll, P.K.² Castello, J.³ O'Sullivan, G.⁴

53
- 0003920042
- Cambridge University Press, New York
- D. Attwood: Soft X-Ray and Extreme Ultraviolet Radiation (Cambridge University Press, New York, 1999) p. 405.
- (1999) Soft X-ray and Extreme Ultraviolet Radiation , pp. 405
- Attwood, D.¹

54
- 0001720758
- A. Bar-Shalom, J. Oreg and M. Klapisch: J. Quant. Spectrosc. Radiat. Transf. 58 (1997) 427.
- (1997) J. Quant. Spectrosc. Radiat. Transf. , vol.58 , pp. 427
- Bar-Shalom, A.¹ Oreg, J.² Klapisch, M.³

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