Effect of focal spot size on in-band 13.5 nm extreme ultraviolet emission from laser-produced Sn plasma

Optics Letters

Volumn 31, Issue 16, 2006, Pages 2492-2494

  Tao, Y ^a   Harilal, S S ^a   Tillack, M S ^a   Sequoia, K L ^a   O'Shay, B ^a   Najmabadi, F ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EUV EMISSION; FOCAL SPOT SIZE; IN BAND;

INTERFEROMETERS; LASER PRODUCED PLASMAS; LIGHT EMISSION; LIGHT SOURCES; LITHOGRAPHY; TIN COMPOUNDS;

ULTRAVIOLET RADIATION;

EID: 33749486534     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.31.002492     Document Type: Article

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