Absolute densities of long lived species in an ionized physical vapor deposition copper-argon plasma

Journal of Applied Physics

Volumn 88, Issue 6, 2000, Pages 3208-3219

  Andrew, Y ^a   Abraham, I ^a   Booske, J H ^a   Lu, Z C ^a   Wendt, A E ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0007689640     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1289219     Document Type: Article

References (23)

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