Millisecond annealing: Past, present and future

Materials Research Society Symposium Proceedings

Volumn 912, Issue , 2006, Pages 3-14

  Timans, Paul ^a   Gelpey, Jeff ^b   McCoy, Steve ^b   Lerch, Wilfried ^a   Paul, Silke ^a  

^a MATTSON THERMAL PRODUCTS GMBH   (United States)

^b Mattson Technology Canada Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CHARGE CARRIERS; CHEMICAL ACTIVATION; DIFFUSION; PROCESS CONTROL; THERMAL EFFECTS;

DOPANT ACTIVATION; MILLISECOND ANNEALING; PULSED FLASH-LAMPS; RAPID THERMAL PROCESSING (RTP); TEMPERATURE CYCLE;

MATERIALS SCIENCE;

EID: 33751052807     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-0912-c01-01     Document Type: Conference Paper

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