SCOPUS 정보 검색 플랫폼

Volumn 45, Issue 5, 2002, Pages 67-72

Device scaling drives pattern effect solutions

Author keywords

[No Author keywords available]

Indexed keywords

COATINGS; HEAT TRANSFER; LITHOGRAPHY; PROCESS CONTROL; RADIATION EFFECTS; SEMICONDUCTOR DEVICE MANUFACTURE; THERMOOXIDATION; THIN FILMS;

PATTERN EFFECTS;

RAPID THERMAL ANNEALING;

EID: 0036570827 PISSN: 0038111X EISSN: None Source Type: Trade Journal
DOI: None Document Type: Article

Times cited : (20)

References (14)

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4
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5
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6
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7
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8
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9
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12
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13
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- Emissivity effects in differential epitaxial growth
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.