Novel H-beam electrothermal actuators with capability of generating bi-directional static displacement

Microsystem Technologies

Volumn 12, Issue 8, 2006, Pages 717-722

  Lee, Chengkuo ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC LOADS; HYDROGEN; INDUSTRIAL APPLICATIONS; MICROELECTROMECHANICAL DEVICES; STRUCTURAL DESIGN; TORQUE CONTROL;

BI-DIRECTIONAL STATIC DISPLACEMENT; ELECTROTHERMAL ACTUATORS; H-BEAM ACTUATORS; ROTATIONAL TORQUES;

MICROACTUATORS;

EID: 33744548404     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-006-0106-2     Document Type: Article

References (18)

1. Chen W-C, Wu C-Y, Lee C (2004) Characterization of bi-stable micromechanism based on buckle spring and electrothermal V-beam actuators. Jpn J Appl Phys 43(6B):3892-3895
2. Chu LL, Gianchandani YB (2003) A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing. J Micromech Microeng 13(2):279-285
3. DeVoe DL (2002) Thermal issues in MEMS and microscale systems. IEEE Trans Components Packaging Technol 25(4):576- 583
4. Guckel H, Klein J, Christenson T, Skrobis K, Laudon M, Lovell EG (1992) Thermomagnetic metal flexure actuators in tech. digest, solid-state sensor and actuator workshop, Hilton Head Island, SC, 73pp
5. Hirano T, Fan L-S, Gao JQ, Lee WY (1998) MEMS milliactuator for hard-disk-drive tracking servo. J MEMS 7(2):149-155
6. Kim C-H, Jeong H-M, Jeon J-U, KimY-K (2003) Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage. J MEMS 12(4):470-478
7. Lee K-C, Lee S-S (2004) Deep X-ray mask with integrated electrothermal micro xy-stage for 3D fabrication. Sens Actuators A 111:37-43
8. Lee C, Wu C-Y (2005) Study of electrothermal V-beam actuators and latched mechanism for optical switch. J Micromech Microeng 15(1):11-19
9. Lee C, Yeh JA (2005) Development of X-beam electrothermal actuators. Microsyst Technol 11:550-555
10. Lerch Ph, Slimane CK, Romanowicz B, Renaud P (1996) Modelization and characterization of asymmetrical thermal microactuators. J Micromech Microeng 6(1):134-137
11. Marxer C, de Rooij NF (1999) Micro-opto-mechanical 2×2 switch for single mode fibers based on plasma etched silicon mirror and electrostatic actuation. J Lightwave Technol 17(1):2-6
12. Pan CS, Hsu W (1997) An electro-thermally and laterally driven polysilicon microactuators. J Micromech Microeng 7(1):7-13
13. Que L, Park JS, Gianchandani YB (1999) Bent-beam electrothermal actuators for high force applications. In: Proceeding of the 12th IEEE international conference on MEMS (MEMS'99), pp 31-36
14. Taylor WP, Brand O, Allen MG (1998) Fully integrated magnetically actuated micromachined relays. J MEMS 7(2):181-191
15. Toshiyoshi H, Mita M, Fujita H (2002) A MEMS piggyback actuator for hard-disk drives. J MEMS 11(6):648-654
16. Vettiger P, Cross G, Despont M, Drechsler U, Düring U, Gotsmann B, Häberle W, Lantz MA, Rothuizen HE, Stutz R, Binning GK (2002) The millipede-nanotechnology entering data storage. IEEE Trans Nanotechnol 1(1):39-55
17. Wang Y, Li Z, McCormick DT, Tien NC (2003) A micromachined RF microrelay with electrothermal actuation. Sens Actuators A 103:231-236
18. Zavracky PM, Majumder S, McGruer NE (1997) Micromechanical switches fabricated using nickel surface micromachining. J MEMS 6(1):3-9