Development of X-beam electrothermal actuators

Microsystem Technologies

Volumn 11, Issue 7, 2005, Pages 550-555

  Lee, Chengkuo ^a   Yeh, J Andrew ^b  

^a ASIA PACIFIC MICROSYSTEMS INC   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; MICROLENSES; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; X RAYS;

BEAM STRUCTURES; STATIC DISPLACEMENT; VOLUME EXPANSION; X-BEAM ACTUATORS;

ELECTROSTATIC ACTUATORS;

EID: 23844543516     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-005-0589-2     Document Type: Review

References (14)

1. Chen C, Lee C, Wu C-Y, Lee H-D, Chen W-C, Huang R-S (2004) Novel X-shaped electrothermal actuators with large displacement. In: Proceedings of the Asia-Pacific conference on transducers and micro-nano technology 2004 (APCOT MNT 04), pp PO2-PO67
2. Chu LL, Gianchandani YB (1996) A micromachined 2D positioner with electrothermal actuation and sub-nanometer capacitive sensing. J Micromech Microeng 13:279-285
3. Comtois JH, Bright VM (1997) Applications for surface-micromachined polysilicon thermal actuators and arrays. Sens Actuators A 58:19-259
4. DeVoe DL (2002) Thermal issues in MEMS and microscale systems. IEEE Trans Components Packaging Technol 25(4):576-583
5. Gianchandani YB, Najafi K (1996) Bent-beam strain sensors. J MEMS 5(1):52-58
6. Hirano T, Fan L-S, Gao JQ, Lee WY (1998) MEMS milliactuator for hard-disk-drive tracking servo. J MEMS 7(2):149-155
7. Kim CH, Jeong HM, Jeon JU, Kim YK (2003) Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage. J MEMS 12(4):470-478
8. Lee KC, Lee SS (2004) Deep X-ray mask with integrated electrothermal micro XY-stage for 3D fabrication. Sens Actuators A 111:37-43
9. Lee C, Wu C-Y (2005) Characterization of bi-stable micromechanism based on buckle spring and electrothermal V-beam actuators. J Micromech Microeng 15(1):11-19
10. Lerch P, Slimane CK, Romanowicz B, Renaud P (1996) Modelization and characterization of asymmetrical thermal microactuators. J Micromech Microeng 6:134-137
11. Pan CS, Hsu W (1997) An electro-thermally and laterally driven polysilicon microactuators. J Micromech Microeng 7:7-1310
12. Que L, Park JS, Gianchandani YB (1999) Bent-beam electrothermal actuators for high force applications. In: Proceeding of the 12th IEEE international conference on MEMS (MEMS '99), pp 31-3612
13. Rothuizen H, Despont M, Drechsler U, Genolet G, Haberle W, Lutwyche M, Stutz R, Vettiger P (2002) Compact copper/epoxy-based electromagnetic scanner for scanning probe applications. In: Proceeding of the 15th IEEE international conference on MEMS (MEMS 2002), pp 582-585
14. Toshiyoshi H, Su G-DJ, LaCosse J, Wu MC (2003) A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process. J Lightwave Technol 21(7): 1700-1708