Large-force electrothermal linear micromotors

Journal of Micromechanics and Microengineering

Volumn 14, Issue 2, 2004, Pages 226-234

  Maloney, John M ^a,b   Schreiber, David S ^a   DeVoe, Don L ^a  

^a UNIVERSITY OF MARYLAND   (United States)

^b MicroCHIPS Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROTHERMAL MOTORS; LINEAR MOTION; VIBROMETERS;

ACTUATORS; ELECTRIC POTENTIAL; ELECTROSTATICS; ENERGY EFFICIENCY; MICROMACHINING; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

LINEAR MOTORS;

EID: 1242265196     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/14/2/009     Document Type: Article

References (22)

1. Daneman M J, Tien N C, Solgaard O, Pisano A P, Lau K Y and Muller R S 1996 Linear microvibromotor for positioning optical components J. Microelectromech. Syst. 5 159-65
2. Baltzer M, Kraus T and Obermeier T 1997 A linear stepping actuator in surface micromachining technology for low voltages and large displacements IEEE Conf. Solid-State Sensors and Actuators (Chicago, IL) pp 781-4
3. Reid J R, Bright V M and Butler J T 1998 Automated assembly of flip-up micromirrors Sensors Actuators A 66 292-8
4. Pai M and Tien N C 2000 Low voltage electrothermal vibromotor for silicon optical bench applications Sensors Actuators A 83 237-43
5. Park J-S, Chu L L, Oliver A D and Gianchandani Y B 2001 Bent-beam electrothermal actuators: II. Linear and rotary microengines J. Microelectromech. Syst. 10 255-62
6. Yeh R, Hollar S and Pister K S J 2002 Single mask, large force, and large displacement electrostatic linear inchworm motors J. Microelectromech. Syst. 11 330-6
7. Kwon H N, Jeong S H, Lee S K and Lee J H 2003 Design and characterization of a micromachined inchworm motor with thermoelastic linkage actuators Sensors Actuators A103 143-9
8. Tas N R, Sonnenberg T, Molenaar R and Elwenspoek M 2003 Design, fabrication and testing of laterally driven electrostatic motors employing walking motion and mechanical leverage J. Micromech. Microeng. 13 N6-15
9. Noworolski J M, Klaassen E H, Logan J R, Peterson K E and Maluf N I 1996 Process for in-plane and out-of-plane single-crystal-silicon thermal microactuators Sensors Actuators A 55 65-9
10. Cragun R and Howell L 1999 Linear thermomechanical microactuators Proc. ASME IMECE (Nashville, TN) pp 181-8
11. Maloney J M, DeVoe D L and Schreiber D S 2000 Analysis and design of electrothermal actuators fabricated from single crystal silicon Proc. ASME IMECE (Orlando, FL) pp 233-40
12. Que L, Park J-S and Gianchandani Y B 2001 Bent-beam electrothermal actuators: I. Single beam and cascaded devices J. Microelectromech. Syst. 10 247-54
13. Lott C. D, McLain T W, Harb J N and Howell L L 2002 Modeling the thermal behavior of a surface-micromachined linear-displacement thermomechanical microactuator Sensors Actuators A 101 239-50
14. Jaeger R C 1988 Introduction to Microelectronic Fabrication (Reading, MA: Addison-Wesley)
15. Huang Q-A and Lee N K S 1999 Analysis and design of polysilicon thermal flexure actuator J. Micromech. Microeng. 9 64-70
16. Mankame N D and Ananthasuresh G K 2001 Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator J. Micromech. Microeng. 11 452-62
17. Hickey R, Sameoto D, Hubbard T and Kujath M 2003 Time and frequency response of two-arm micromachined thermal actuators J, Micromech. Microeng. 13 40-6
18. Geisberger A A, Sarkar N, Ellis M and Skidmore G D 2003 Electrothermal properties and modeling of polysilicon microthermal actuators J. Microelectromech. Syst. 12 513-23
19. Lin L and Chiao M 1996 Electrothermal responses of lineshape microstructures Sensors Actuators A 55 35-41
20. Incropera F and DeWitt D 1996 Fundamentals of Heat and Mass Transfer (New York: Wiley)
21. Touloukian Y S, Powell R W, Ho C Y and Klemens P G 1970 Thermophysical Properties of Matter (New York: IFI/Plenum)
22. Pearson G L and Bardeen J 1949 Electrical properties of pure silicon and silicon alloys containing boron and phosphorus Phys. Rev. 75 865-83