Direct micromachining of quartz glass plates using pulsed laser plasma soft x-rays

Applied Physics Letters

Volumn 86, Issue 10, 2005, Pages 1-2

  Makimura, Tetsuya ^a   Miyamoto, Hisao ^a   Kenmotsu, Youichi ^a   Murakami, Kouichi ^a   Niino, Hiroyuki ^b  

^a UNIVERSITY OF TSUKUBA   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION; LASERS; MICROMACHINING; MIRRORS; QUARTZ; SOLID STATE LASERS; X RAYS;

LASER PLASMA SOFT X-RAYS (LPSX); PHOTON ABSORBERS; PULSED LASER PLASMAS; QUARTZ GLASS PLATES;

GLASS;

EID: 17944372643     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1882750     Document Type: Article

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