Characterization of vapor deposited poly (ethylene glycol) films on silicon surfaces for surface modification of microfluidic systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 21, Issue 2, 2003, Pages 645-654

  Popat, Ketul C ^a,c   Johnson, Robert W ^b   Desai, Tejal A ^c  

^a University of Illinois at Chicago   (United States)

^b ABBOTT LABORATORIES   (United States)

^c Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; CONTACT ANGLE; POLYETHYLENE GLYCOLS; SILICON; SURFACE TREATMENT; VAPOR DEPOSITION; X RAY PHOTOELECTRON SPECTROSCOPY;

MICROFLUIDIC SYSTEMS;

PLASTIC FILMS;

EID: 0037276786     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1545733     Document Type: Article

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