Characterization of vapor deposited thin silane films on silicon substrates for biomedical microdevices

Surface and Coatings Technology

Volumn 154, Issue 2-3, 2002, Pages 253-261

  Popat, Ketul C ^a   Johnson, Robert W ^b   Desai, Tejal A ^a,c  

^a University of Illinois at Chicago   (United States)

^b ABBOTT LABORATORIES   (United States)

^c Boston University   (United States)

Author keywords

Atomic force microscopy; Chemical vapor deposition; Photoelectron spectroscopy; Silicon

Indexed keywords

HYDROPHOBICITY; MULTILAYERS; PROTEINS; SILANES; SILICON; THIN FILMS;

BIOMEDICAL MICRODEVICES;

VAPOR DEPOSITION;

MEDICAL APPLICATION;

EID: 0037094439     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00019-1     Document Type: Article

References (9)