A three terminal test structure to measure stiction force using I-V data

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 252-256

  Bhattacharya, Enakshi ^a   Kuang, Jinbo ^b,c   Judy, Michael ^b   Martin, Jack ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b ANALOG DEVICES INC   (United States)

^c Micromachined Product Division   (United States)

Author keywords

Measurement; MEMS; Stiction

Indexed keywords

ACCELEROMETERS; CANTILEVER BEAMS; FAILURE ANALYSIS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS;

STICTION FORCE;

STICTION;

EID: 0035772290     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.448974     Document Type: Article

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