Plasma and ion sources in large area coating: A review

Surface and Coatings Technology

Volumn 200, Issue 5-6, 2005, Pages 1893-1906

  Anders, André ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Large area processing; Plasma and ion sources; Plasma and ion surface treatment; Plasma assisted deposition

Indexed keywords

COATINGS; FILM GROWTH; ION SOURCES; MAGNETRONS; MICROWAVES; PLASMA SOURCES; SURFACE TREATMENT;

HIGH QUALITY COATINGS; LARGE AREA COATING; LARGE AREA PROCESSING; MICROWAVE DISCHARGES; PLASMA ASSISTED DEPOSITION;

COATING TECHNIQUES;

COATING;

EID: 28944453943     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.08.018     Document Type: Article

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