Parallel operation of microhollow cathode discharges

IEEE Transactions on Plasma Science

Volumn 27, Issue 1, 1999, Pages 16-17

  Shi, Wenhui ^a   Stark, Robert H ^a   Schoenbach, Karl H ^a  

^a Old Dominion University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODES; CATHODES; CURRENT VOLTAGE CHARACTERISTICS; ELECTRODES; LIGHT SOURCES;

CATHODE DISCHARGES; GAS DISCHARGES;

GLOW DISCHARGES;

EID: 0032675497     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.763000     Document Type: Article

References (6)

1. K. H. Schoenbach, C. A. Verhappen, T. Tessnow, F. E. Peterkin, and W. W. Byszewski, "Microhollow cathode discharges," Appl. Phys. Lett., vol. 68, no. 1, pp. 13-15, 1996.
2. A. Fiala, L. C. Pitchford, and J. P. Boeuf, "Two-dimensional, hybrid model of glow discharge in hollow cathode geometries," in Proc. XXII Conf. Phenomena Ionized Gases, Hoboken, NJ, 1995, vol. 4, pp. 191-192.
3. K. H. Schoenbach, T. Tessnow, and R. Verhappen, "High pressure hollow cathode discharges," in Conf. Record, IEEE ICOPS, Boston, MA, 1996, p. 229.
4. J. W. Frame, D. J. Wheeler, T. A. DeTemple, and J. G. Eden, "Microdischarge devices fabricated in silicon," Appl. Phys. Lett., vol. 71, no. 9, pp. 1165-1167, Sept. 1997.
5. K. H. Schoenbach, A. El-Habachi, W. Shi, and M. Ciocca, "High pressure hollow cathode discharges," Plasma Sources Sci. Technol, vol. 6, pp. 468-477, 1997.
6. A. El-Habachi and K. H. Schoenbach, "Generation of intense excimer radiation from high-pressure hollow cathode discharges," Appl. Phys. Lett., vol. 73, no. 7, pp. 885-887, Aug. 1998.