Influence of the multipolar magnetic field configuration on the density of distributed electron cyclotron resonance plasmas

Plasma Sources Science and Technology

Volumn 6, Issue 1, 1997, Pages 53-60

  Lagarde, T ^a,b   Pelletier, J ^a   Arnal, Y ^a  

^a CNRS   (France)

^b Metal Process   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON CYCLOTRON RESONANCE; ELECTRONS; MAGNETIC FIELDS; MAGNETS; MICROWAVES; PLASMA CONFINEMENT; PLASMAS;

CYLINDRICAL REACTORS; MULTIPOLAR;

PLASMA SOURCES;

EID: 0031069253     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/6/1/008     Document Type: Article

References (20)

1. Limpaecher R and MacKenzie K R 1973 Rev. Sci. Instrum. 44 726
2. Leung K N, Samec T K and Lamm A 1975 Phys. Lett. 51A 490
3. Sadowski M 1969 Phys. Lett. 28A 626
4. Buzzi J M, Snow J and Hirshfield J L 1975 Phys. Lett. 54A 344
5. Gauthereau C and Matthieussent G 1984 Phys. Lett. 102A 231
6. Pelletier J and Matthieussent G 1992 Homogeneity in multipolar discharges: the role of primary electrons Microwave Excited Plasmas ed M Moisan and J Pelletier (Amsterdam: Elsevier) p 351
7. Koch C and Matthieussent G 1983 Phys. Fluids 26 545
8. Matthieussent G and Pelletier J 1992 Ambipolar diffusion model of multipolar plasmas Microwave Excited Plasmas ed M Moisan and J Pelletier (Amsterdam: Elsevier) p 303
9. Gauthereau C and Matthieussent G 1984 J. Physique 45 1113
10. Pelletier J and Lagarde T 1994 Thin Solid Films 241 240
11. Northrop T G 1963 The Adiabatic Motion of Charged Particles (New York: Interscience)
12. Delcroix J L and Bers A 1994 Physique des Plasmas vol 1 (Paris: InterEditions-CNRS)
13. Courteille C, Bruneteau J, Valckx F P G, Sledziewski Z and Bacal M 1993 Rev. Sci. Instrum. 64 3265
14. Pichot M, Durandet A, Pelletier J, Arnal Y and Vallier L 1988 Rev. Sci. Instrum. 59 1072
15. Pichot M and Pelletier J 1992 Distributed electron cyclotron resonance (DECR) plasmas Microwave Excited Plasmas ed M Moisan and J Pelletier (Amsterdam: Elsevier) p 419
16. Pelletier J 1995 Distributed ECR plasma sources High Density Plasma Sources: Design, Physics and Performance ed O A Popov (Park Ridge: Noyes) p 380
17. Arnal Y, Pelletier J, Pomathiod L and Vallier L 1991 Vide Couches Minces Supplement 256, 235
18. Rostaing J C, Coeuret F, Pelletier J, Lagarde T and Etemadi R 1995 Thin Solid Films 270 49
19. Stevens E J 1995 Electron cyclotron resonance plasma sources High Density Plasma Sources: Design, Physics and Performance ed O A Popov (Park Ridge: Noyes) p 312
20. Lagarde T 1994 DrSc Thesis (University XI Orsay, Paris, France)