Stress relief and texture formation in aluminium nitride by plasma immersion ion implantation

Journal of Physics Condensed Matter

Volumn 16, Issue 10, 2004, Pages 1751-1760

  Gan, B K ^a   Bilek, M M M ^a   McKenzie, D R ^a   Shi, Yang ^a   Tompsett, D A ^a   Taylor, M B ^b   McCulloch, D G ^b  

^a UNIVERSITY OF SYDNEY   (Australia)

^b RMIT UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODIC ARC DEPOSITION; EXPONENTIAL FUNCTIONS; IN PLANE ORIENTATION; PLASMA IMMERSION ION IMPLANTATION; PULSE VOLTAGE PULSE FREQUENCY;

CRYSTAL ORIENTATION; ELECTRODEPOSITION; FREQUENCIES; FUNCTIONS; ION BEAMS; ION IMPLANTATION; LASER PULSES; PLASMAS; STRESSES; TEXTURES; THIN FILMS; THRESHOLD VOLTAGE;

ALUMINUM NITRIDE;

EID: 1642368056     PISSN: 09538984     EISSN: None     Source Type: Journal    
DOI: 10.1088/0953-8984/16/10/007     Document Type: Article

References (15)

1. Gan B K, Bilek M M M, McKenzie D R, Taylor M B and McCulloch D G 2004 95 J. Appl. Phys. (4) 2130
2. Tarrant R N, Montross C S and McKenzie D R 2001 Surf. Coat. Technol. 136 188
3. Stoney G G 1909 Proc. R. Soc. A 82 172
4. Kwok D T K, Bilek M M M, McKenzie D R and Chu P K 2003 Appl. Phys. Lett. 82 1827
5. Bilek M M M, McKenzie D R and Moeller W 2003 Surf. Coat. Technol. submitted
6. Bilek M M M et al 2004 Contrib. Plasma Phys. at press
7. Benguigui L 1984 Phys. Rev. Lett. 53 2028
8. McKenzie D R, Pearce G K, Marks N A, Bilek M M M and Tarrant R N 2003 Diamond Relat. Mater. submitted
9. Pelleg J, Zenin L Z, Lungo S and Croiton N 1991 Thin Solid Films 197 117
10. Oh U C and Je J H 1993 J. Appl. Phys. 74 1692
11. McKenzie D R and Bilek M M M 1999 J. Appl. Phys. 86 230
12. Lim S H N, McCulloch D G, Bilek M M M and McKenzie D R 2003 Surf. Coat. Technol. 174/175 76
13. Clement M, Iborra E, Sangrado J, Sanz-Hervas A, Vergara L and Agular M 2003 J. Appl. Phys. 94 1495.
14. Russo S, Wilson N, McCulloch D G and Prawer S 2003 private communication
15. Dong L and Srolovitz D J 1998 J. Appl. Phys. 84 5261