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Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 638-642

Fluorine and boron co-doped diamond-like carbon films deposited by pulsed glow discharge plasma immersion ion processing

(5) He, Xiao Ming a Hakovirta, M a Peters, A M a Taylor, B a Nastasi, M a

a LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BORON; CHEMICAL BONDS; DENSITY (SPECIFIC GRAVITY); DIELECTRIC FILMS; FILM PREPARATION; FLUORINE; GLOW DISCHARGES; HARDNESS; PLASMA APPLICATIONS; SEMICONDUCTOR DOPING; STRUCTURE (COMPOSITION); SUBSTRATES;

DIAMOND LIKE CARBON; DIBORANE; ELASTIC RECOIL DETECTION; FLOW RATIO; HEXAFLUOROETHANE; ION BEAM ANALYSIS; PULSED GLOW DISCHARGE PLASMA IMMERSION ION PROCESSING; RESONANT ION BACKSCATTERING SPECTROMETRY;

DIAMOND LIKE CARBON FILMS;

EID: 0036565049 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1460890 Document Type: Article

Times cited : (16)

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