T-junction tuning system for large-area surface-wave plasma sources

Applied Physics Letters

Volumn 80, Issue 7, 2002, Pages 1132-1134

  Kudela, Jozef ^a   Terebessy, Tibor ^a   Odrobina, Igor ^a   Kando, Masashi ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY PROFILE; MICROWAVE DISCHARGE; RADIAL PLASMA; SURFACE WAVE PLASMA; T JUNCTIONS; TUNING ELEMENTS; TUNING SYSTEM;

DIELECTRIC DEVICES; PLASMA DENSITY; PLASMA SOURCES; SURFACE WAVES;

ELECTRIC DISCHARGES;

EID: 79956055147     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1448399     Document Type: Article

References (14)

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