Large-area plasma produced by surface waves on a metal wall with periodic grooves

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 5, 2001, Pages 2433-2440

  Yamauchi, T ^a   Aoki, K ^a   Kanoh, M ^a   Sugai, H ^b  

^a TOSHIBA CORPORATION   (Japan)

^b NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; CHARGE COUPLED DEVICES; CHEMICAL VAPOR DEPOSITION; DIELECTRIC DEVICES; GLASS; INTERFACES (MATERIALS); LIQUID CRYSTAL DISPLAYS; MAGNETIC FIELD EFFECTS; MICROWAVE INTEGRATED CIRCUITS; PLASMA COLLISION PROCESSES; PLASMA ETCHING; SLOT ANTENNAS; SUBSTRATES; SURFACE DISCHARGES; WAVE PLASMA INTERACTIONS;

MICROWAVE DISCHARGES; PERIODIC GROOVES;

PLASMA SOURCES;

EID: 0035440288     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1387077     Document Type: Article

References (12)