Mid frequency sputtering - A novel tool for large area coating

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 658-662

  Brauer G ^a   Szczyrbowski, J ^a   Teschner, G ^a  

^a EVONIK INDUSTRIES AG   (Germany)

Author keywords

Glass coating; Magnetron sputtering; Optical coatings; Reactive sputtering

Indexed keywords

ANTIREFLECTION COATINGS; CORROSION RESISTANCE; FILM GROWTH; GLASS; ION BOMBARDMENT; MAGNETRON SPUTTERING; OPTICAL PROPERTIES; SILICA; SILICON NITRIDE; SPUTTER DEPOSITION; TIN COMPOUNDS; TITANIUM DIOXIDE;

TIN OXIDE;

OPTICAL COATINGS;

EID: 0031247497     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00516-1     Document Type: Article

References (11)

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