Plasma synthesis of hard materials with energetic ions

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 12-16

  Monteiro, Othon R ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Diamondlike carbon films; Filtered cathodic arc deposition; Plasma deposition

Indexed keywords

AMORPHOUS FILMS; BLENDING; CARBIDES; CARBON; DEPOSITION; INTERFACES (MATERIALS); ION BEAMS; MICROSTRUCTURE; MORPHOLOGY; MULTILAYERS; PLASMA APPLICATIONS; PLASMA SOURCES;

DIAMOND LIKE CARBON (DLC) FILMS; FILTERED CATHODIC ARC DEPOSITION; PLASMA DEPOSITION; PLASMA SYNTHESIS;

ION IMPLANTATION;

EID: 0033513936     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00685-5     Document Type: Article

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