Synchrotron radiation direct photo etching of polymers

Advances in Polymer Science

Volumn 168, Issue , 2004, Pages 291-340

  Zhang, Y ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

POLYMER;

DISSOCIATION; EXCIMER LASER; FILM; LASER; LASER SURGERY; LIGHT; MASS SPECTROMETRY; OPTICS; PHOTOCHEMICAL EFFICIENCY; PHOTOETCHING; QUALITY CONTROL; REVIEW; SYNCHROTRON RADIATION; THICKNESS; VACUUM; X RAY;

EID: 2442706542     PISSN: 00653195     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Review

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