Deep lithography with a low energy synchrotron source: Fabrication of X-ray refractive single lenses

Microsystem Technologies

Volumn 8, Issue 2-3, 2002, Pages 99-101

  Zhang, Y ^a   Katoh, T ^a   Amano, D ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

IMAGE PROCESSING; LENSES; POLYMETHYL METHACRYLATES; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

X RAY REFLECTIVE LENSES;

MICROELECTROMECHANICAL DEVICES;

EID: 0036575355     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-001-0170-6     Document Type: Conference Paper

References (7)

1. Deep X-ray lithography for micromechanics and precision engineering
2. Application of the supperconductiong compact ring AURORA
3. Fresnel and refractive lenses for X-rays
4. A compact warm ring for industrial applications
5. Focusing hard X-ray with a single lens