Deposition of Teflon-polymer thin films by synchrotron radiation photodecomposition

Applied Surface Science

Volumn 138-139, Issue 1-4, 1999, Pages 165-168

  Katoh, T ^a   Zhang, Y ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

Laser ablation; Photo etching; Polymer; Synchrotron; Teflon; Thin film

Indexed keywords

EID: 0000957471     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00395-X     Document Type: Article

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