Microfabrication of crosslinked polytetrafluoroethylene using synchrotron radiation direct photo-etching

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 24-28

  Katoh, T ^a   Yamaguchi, D ^b   Satoh, Y ^b   Ikeda, S ^c   Aoki, Y ^a   Washio, M ^b   Tabata, Y ^d  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^b WASEDA UNIVERSITY   (Japan)

^c RAYTECH Corporation   (Japan)

^d UNIVERSITY OF TOKYO   (Japan)

Author keywords

Crosslinking; High aspect ratio; Microfabrication; Photo etching; PTFE; Synchrotron radiation

Indexed keywords

ASPECT RATIO; CROSSLINKING; DIFFERENTIAL SCANNING CALORIMETRY; ETCHING; IRRADIATION; SYNCHROTRON RADIATION; THERMAL EFFECTS;

PHOTO-ETCHING;

POLYTETRAFLUOROETHYLENES;

EID: 0037185116     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00657-2     Document Type: Conference Paper

References (13)