High aspect-ratio micromachining of polymers with an ultrafast laser

Applied Surface Science

Volumn 186, Issue 1-4, 2002, Pages 345-351

  Zhang, Y ^a   Lowe, R M ^b   Harvey, E ^b   Hannaford, P ^b   Endo, A ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^b SWINBURNE UNIVERSITY OF TECHNOLOGY   (Australia)

Author keywords

High aspect ratio; Micromachining; Polymers; Ultrafast laser

Indexed keywords

LASER PULSES; MICROMACHINING; POLYMERS; SOLID STATE LASERS;

ULTRAFAST LASERS;

LASER ABLATION;

EID: 0037185157     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(01)00673-0     Document Type: Conference Paper

References (8)