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Volumn 68, Issue 6, 1996, Pages 865-867

Synchrotron radiation ablative photodecomposition and production of crystalline fluoropolymer thin films

Author keywords

[No Author keywords available]

Indexed keywords


EID: 0000814813     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116526     Document Type: Article
Times cited : (43)

References (13)
  • 5
    • 36449006953 scopus 로고    scopus 로고
    • G. B. Blanchet and S. I. Shah, Appl. Phys. Lett. 62, 1026 (1993); G. B. Blanchet, C. R. Fincher, Jr., C. L. Jackson, S. I. Shah, and K. H. Gardner, Science 262, 719 (1993)
    • G. B. Blanchet and S. I. Shah, Appl. Phys. Lett. 62, 1026 (1993); G. B. Blanchet, C. R. Fincher, Jr., C. L. Jackson, S. I. Shah, and K. H. Gardner, Science 262, 719 (1993).
  • 7
    • 0027687129 scopus 로고    scopus 로고
    • J. T. Dickinson, J-J. Shin, W. Jiang, and M. G. Norton, J. Appl. Phys. 74, 4729 (1993); Nucl. Instrum. Methods, B 91, 672 (1994)
    • J. T. Dickinson, J-J. Shin, W. Jiang, and M. G. Norton, J. Appl. Phys. 74, 4729 (1993); Nucl. Instrum. Methods, B 91, 672 (1994).
  • 9
    • 22244489795 scopus 로고    scopus 로고
    • Thickness distribution was measured with ellipsometry at 675 nm
    • Thickness distribution was measured with ellipsometry at 675 nm.
  • 10
    • 0020090984 scopus 로고    scopus 로고
    • D. R. Wheeler and S. V. Pepper, J. Vac. Sci. Technol. 20, 226 (1982); J. Vac. Sci. Technol. A 8, 4046 (1990)
    • D. R. Wheeler and S. V. Pepper, J. Vac. Sci. Technol. 20, 226 (1982); J. Vac. Sci. Technol. A 8, 4046 (1990).


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