Technique for 25 nm x-ray nanolithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2428-2433

  Toyota, Eijiro ^a   Hori, Toshitada ^a   Khan, Mumit ^b   Cerrina, Franco ^b  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; IMAGE QUALITY; IMAGING TECHNIQUES; LIGHT PROPAGATION; LIGHT SOURCES; NANOTECHNOLOGY; PATTERN MATCHING; PHOTORESISTS;

ENLARGED PATTERN MASKS; IMAGE FORMING; IMAGE PATTERN; INTERFERENCE SLIT MASKS; X RAY BEAM; X RAY NANOTECHNOLOGY;

X RAY LITHOGRAPHY;

EID: 0035519802     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1415503     Document Type: Article

References (18)

1. M. Khan, G. Han, S. Bollepalli, F. Cerrina, and J. Maldonado, J. Vac. Sci. Technol. B 17, 3426 (1999).
2. T. Kitayama, Digest Papers XEL2000, Yokohama, Japan, 2000.
3. T. Hori and T. Takayama, Proceedings of ICSRS-AFSR'95, Pohang, Korea, 1995 (unpublished)
4. H. Miyade, D. Amano, and T. Hori, Digest Papers, XEL2000, Yokohama, Japan, 2000.
5. E. Toyota, J. Vac. Sci. Technol. B 16, 3462 (1998).
6. E. Toyota, Jpn. J. Appl. Phys., Part 1 38, 3513 (1999).
7. S. Hirose, T. Miyatake, X. Li, E. Toyota, M. Hirose, K. Fujii, and K. Suzuki, J. Vac. Sci. Technol. B 18, 2986 (2000).
8. K. Itoga and T. Kitayama (private communication).
9. S. Bollepalli, M. Khan, and F. Cerrina, Digest Papers XEL'98, Yokohama, Japan, 1998.
10. W. Chu, H. Smith, and M. Schattenburg, Appl. Phys. Lett. 59, 1641 (1991).
11. Y. Chen, R. Kupka, F. Rousseaux, F. Carcenac, D. Decanini, M. Ravet, and H. Launois, J. Vac. Sci. Technol. B 12, 3959 (1994).
12. Y. Kikuchi, Y. Matsui, M. Hasegawa, and T. Terasawa, Digest Papers, XEL2000, Yokohama, Japan, 2000.
13. S. Hirose, T. Miyatake, D. Amano, X. Li, and T. Hori, Digest Papers, XEL2000, Yokohama, Japan, 2000.
14. Y. Kikuchi, JTTA, Internal Report, August 1996.
15. Y. Vladimirsky, A. Bourdillon, O. Vladirsky, W. Jiang, and Q. Leonard, J. Phys. D 32, L1 (1999).
16. Y. Watanabe, S. Hara, N. Mizusawa, Y. Fukuda, and S. Uzawa, J. Vac. Sci. Technol. B 15, 2503 (1996).
17. H. Smith, J. Vac. Sci. Technol. B 14, 4318 (1996).
18. T. Miyatake (private communication).