Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 35, Issue 2 A, 1996, Pages

  Zhang, Yanping ^a   Katoh, Takanori ^a  

^a SUMITOMO HEAVY INDUSTRIES LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DECOMPOSITION; LASER ABLATION; MICROSTRUCTURE; POLYTETRAFLUOROETHYLENES; SCANNING ELECTRON MICROSCOPY; SYNCHROTRON RADIATION; THERMOCOUPLES;

CRITICAL DEPENDENCE LIMITATION; HIGH ASPECT RATIO MICROPARTS; PHOTON FLUX;

MICROMACHINING;

EID: 0030086996     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.35.L186     Document Type: Article

References (17)