Pattern transfer by direct photo etching of poly(vinylidene fluoride) using X rays

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 417-422

  Manohara, Harish M ^a   Morikawa, Eizi ^a   Choi, Jaewu ^a   Sprunger, Phillip T ^a  

^a LOUISIANA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; FLUORINE CONTAINING POLYMERS; MICROELECTROMECHANICAL DEVICES; SURFACE ROUGHNESS; VINYL RESINS; X RAYS;

PHOTO ETCHING; POLYVINYLIDENE FLUORIDE;

PHOTOLITHOGRAPHY;

EID: 0033338621     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809056     Document Type: Article

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