A selective review of the quantification of defect dynamics in growing Czochralski silicon crystals

Industrial and Engineering Chemistry Research

Volumn 44, Issue 16, 2005, Pages 6246-6263

  Kulkarni, Milind S ^a  

^a MEMC Electronic Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECT DYNAMICS; FLOAT-ZONE (FZ) PROCESS; MICROELECTRONIC DEVICES; SILICON CRYSTALS;

AGGLOMERATION; CRYSTALLINE MATERIALS; CRYSTALS; DEFECTS; MICROELECTRONICS; SILICON; SUBSTRATES;

CRYSTAL GROWTH FROM MELT;

MICROELECTRONICS;

EID: 23944452385     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie0500422     Document Type: Review

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