Octahedral void defects observed in the bulk of Czochralski silicon

Applied Physics Letters

Volumn 70, Issue 10, 1997, Pages 1248-1250

  Ueki, Takemi ^a   Itsumi, Manabu ^a   Takeda, Tadao ^a  

^a NTT CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001266625     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118543     Document Type: Article

References (4)

1. M. Itsumi and F. Kiyosumi, Appl. Phys. Lett. 40, 496 (1982).
2. M. Itsumi, M. Tomita, and M. Yamawaki, J. Appl. Phys. 78, 1940 (1995).
3. M. Itsumi, H. Akiya, T. Ueki, M. Tomita, and M. Yamawaki, J. Appl. Phys. 78, 5984 (1995).
4. M. Itsumi, H. Akiya, T. Ueki, M. Tomita, and M. Yamawaki, Jpn. J. Appl. Phys. 1 35, 812 (1996).