A review and unifying analysis of defect decoration and surface polishing by chemical etching in silicon processing

Industrial and Engineering Chemistry Research

Volumn 42, Issue 12, 2003, Pages 2558-2588

  Kulkarni, Milind S ^a  

^a MEMC Electronic Materials Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DECORATION; DISSOLUTION; ETCHING; POLISHING; PRECIPITATION (CHEMICAL);

DEFECT DECORATION;

SILICON;

COPPER; REAGENT; SILICON;

DEFECT; DYNAMICS; ETCHING; INDUSTRIAL APPLICATION; POLISHING; PROCESS CONTROL;

BIOPOLISHING; BIOPROCESS; DISSOLUTION; DYNAMICS; LIQUID; MATHEMATICAL MODEL; REVIEW; SURFACE PROPERTY; VALIDATION PROCESS;

EID: 0037534311     PISSN: 08885885     EISSN: None     Source Type: Journal    
DOI: 10.1021/ie020716y     Document Type: Review

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