Simplified two-dimensional quantification of the microdefect distributions in silicon crystals grown by the Czochralski process

Proceedings - Electrochemical Society

Volumn 5, Issue , 2004, Pages 254-263

  Kulkarni, Milind S ^a   Voronkov, Vladimir ^b  

^a MEMC Electronic Materials Inc   (United States)

^b MEMC Electronic Materials   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AGGLOMERATION; CRYSTAL GROWTH; DISLOCATIONS (CRYSTALS); NUCLEATION; POINT DEFECTS; PRECIPITATION (CHEMICAL); THERMAL EFFECTS;

CZOCHRALSKI PROCESS; FLOAT ZONE (FZ); SILICON CRYSTALS; TEMPERATURE FIELD;

SILICON;

EID: 17144365055     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (44)

1. W. C. Dash, J. Appl. Phys., 29, 736 (1958)
2. W. C. Dash, J. Appl. Phys., 30, 459 (1958)
3. F. Shimura, Semiconductor Silicon Crystal Technology, p56, Academic Press, Inc., San-Diego (1989).
4. T. Abe, T. Samizo, and S. Maruyama, Jpn. J. Appl. Phys., 5, 458 (1966).
5. A. J. R. de Kock, Appl. Phys. Letters, 16, 100 (1970).
6. A. J. R. de Kock, J. Electrochem. Soc., 118, 1851 (1971).
7. A. J. R. de Kock, ACTA ELECTRONICA, 16, 4, 303 (1973).
8. A. J. R. de Kock, P. J. Roksnoer and P. G. T. Boonen, J. Cryst. Growth, 22, 311 (1974).
9. A. J. R. de Kock, P. J. Roksnoer and P. G. T. Boonen, J. Cryst. Growth, 28, 311 (1975).
10. P. M. Petroff and A. J. R. de Kock, J. Cryst. Growth, 30, 117 (1975).
11. P. M. Petroff and A. J. R. de Kock, J. Cryst. Growth, 36, 4 (1976).
12. H. Foil, U. Gösele and B. O. Kolbesen, J. Cryst. Growth, 40, 90 (1977).
13. A. J. R. de Kock and W. M. van de Wiljert J. Cryst. Growth, 49, 718 (1980).
14. P. J. Roksnoer and M. M. B. van den Boom, J. Cryst. Growth, 53, 563 (1981).
15. P. J. Roksnoer, J. Cryst. Growth, 68, 596 (1984).
16. M. Kato, T. Yoshida, Y. Ikeda, and Y. Kitagawara, Jpn. J. Appl. Phys., 35, 5597 (1996).
17. T. Ueki, M. Itsumi, and T. Takeda, Appl. Phys. Lett., 70, 1248 (1997).
18. V. V. Voronkov, J. Crystal Growth, 59, 625 (1982).
19. S. Sadamitsu, S. Umeno, Y. Koike, M. Hourai, S. Sumita, and T. Shigematsu, Jpn. J. Appl. Phys., 32, 3675 (1993).
20. W. von Ammon, E. Dornberger, H. Oelkrug, H. Weidner, J. Crystal Growth, 151, 273 (1995).
21. E. Dornberger and W. von Ammon, J. Electrochem. Soc., 143, 1648 (1996).
22. E. Dornberger, W. von Ammon, N. Van den Bogaert, and F. Dupret, J. Cryst. Growth, 166, 452 (1996).
23. R. Falster, V. V. Voronkov, J. C. Holzer, S. Markgraf, S. McQuaid, and L. Muléstagno, Electrochemical Society Proceedings, 98-1, 468 (1998).
24. M. Hasebe, Y.Takeoka, S. Shinoyama, and S. Naito, Jpn. J. Appl. Phys., 28, L 1999 (1989).
25. K. Nakamura, T. Saishoji, T. Kubota, T. Iida, Y. Shimanuki, T. Kotooka, and J. Tomioka, J. Cryst. Growth, 180, 61 (1997).
26. V. V. Voronkov and R. Falster, J. Cryst. Growth, 194, 76 (1998).
27. T. Sinno, R. A. Brown, W. von Ammon, and E. Dornberger, J. Electrochem. Soc., 145, 302 (1998).
28. V. V. Voronkov and R. Falster, J. Cryst. Growth, 204, 462 (1999a).
29. V. V. Voronkov and R. Falster, J. Appl. Phys., 86, 5957 (1999b)
30. Z. Wang, R. Brown, J. Cryst. Growth, 231, 442 (2001).
31. R. A. Brown, D. Maroudas, and T. Sinno, J. Cryst. Growth, 137, 12 (1994).
32. N. I. Puzanov, A. M. Eidenzon, D. N. Puzanov, J. Cryst. Growth, 178, 468 (1997).
33. E. Dornberger, W. von Ammon, J. Virbulis, B. Hanna, and T. Sinno, J. Cryst. Growth, 230, 291 (2001).
34. M. Okui, and M. Nishimoto, J. Cryst. Growth, 237-239, 1651 (2002).
35. V. V. Kalaev, D. P. Lukanin, V. A. Zabelin, Yu. N. Makarov, J. Virbulis, E. Dornberger, and W. von Ammon J. Cryst. Growth, 250, 203 (2003).
36. T. Sinno and R. A. Brown, J. Electrochem. Soc., 146, 2300 (1999).
37. R. A. Brown, Z. Wang, and T. Mori, J. Cryst. Growth, 225, 97 (2001).
38. M.S. Kulkarni, V. V. Voronkov, and R. Falster, J. Electrochem. Soc., 151, Accepted for Publication (2004).
39. D. Turnbull and J. C. Fisher, J. Chem. Phys., 17, 71 (1949).
40. A. S. Michaels, Nucleation Phenomena, American Chemical Society, 1966.
41. D. Kashchiev, Nucleation, Basic Theory with Applications, Butterworth- Heinemann, 2000.
42. M. S. Kulkarni, J. Libbert, S. Keltner, and L. Mulestagno, J. Electrochem. Soc., 149, G153-G165 (2002).
43. M. S. Kulkarni, Ind. Eng. Chem. Res., 42, vol 6, (2003).
44. A.Virzi, J. Crys. Growth, 112, 699 (1991).