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Volumn 178, Issue 4, 1997, Pages 468-478
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Modelling microdefect distribution in dislocation-free Si crystals grown from the melt
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Author keywords
Crystal; Intrinsic point defects; Microdefect; Silicon; Simulation
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Indexed keywords
ACTIVATION ENERGY;
COMPUTER SIMULATION;
COOLING;
CRYSTAL GROWTH FROM MELT;
CRYSTAL IMPURITIES;
INTERFACES (MATERIALS);
POINT DEFECTS;
TEMPERATURE DISTRIBUTION;
MICRODEFECTS;
VORONKOV THEORY;
SILICON;
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EID: 0031177177
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(97)00006-7 Document Type: Article |
Times cited : (17)
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References (14)
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