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Volumn 150, Issue 12, 2003, Pages

Structure, energetics, and thermal stability of nitrogen-vacancy-related defects in nitrogen doped silicon

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH; DOPING (ADDITIVES); ELECTRONIC STRUCTURE; ENERGY DISPERSIVE SPECTROSCOPY; GROUND STATE; NITROGEN; SILICON; THERMODYNAMIC STABILITY;

EID: 0345759673     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1621418     Document Type: Article
Times cited : (26)

References (58)
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    • T. Abe, T. Matsui, H. Harada, and J. Chikawa, in Very Large Scale Integration Science and Technology, W. M. Bullis and S. Broydo, Editors, PV 85-5, p. 543, The Electrochemical Society Proceedings Series, Pennington, NJ (1985).
    • (1985) Very Large Scale Integration Science and Technology , pp. 543
    • Abe, T.1    Matsui, T.2    Harada, H.3    Chikawa, J.4
  • 5
    • 0042902211 scopus 로고
    • K. E. Bean and G. A. Rozgonyi, Editors, PV 84-7; The Electrochemical Society Proceedings Series, Pennington, NJ
    • H. D. Chiou, J. Moody, R. Sandfort, and F. Shimura, VLSI Science and Technology, K. E. Bean and G. A. Rozgonyi, Editors, PV 84-7, p. 59, The Electrochemical Society Proceedings Series, Pennington, NJ (1984).
    • (1984) VLSI Science and Technology , pp. 59
    • Chiou, H.D.1    Moody, J.2    Sandfort, R.3    Shimura, F.4
  • 18
    • 0008810858 scopus 로고    scopus 로고
    • C. L. Claeys, P. Rai-Choudhury, M. Watnabe, P. Stallhofer, and H. J. Dawson, Editors, PV(2000-17; The Electrochemical Society Proceedings Series, Pennington, NJ (2000)
    • F. Quast, P. Pichler, H. Ryssel, and R. Falster, in High Purity Silicon, C. L. Claeys, P. Rai-Choudhury, M. Watnabe, P. Stallhofer, and H. J. Dawson, Editors, PV(2000-17, p. 156, The Electrochemical Society Proceedings Series, Pennington, NJ (2000).
    • (2000) High Purity Silicon , pp. 156
    • Quast, F.1    Pichler, P.2    Ryssel, H.3    Falster, R.4
  • 32
    • 0345912586 scopus 로고    scopus 로고
    • note
    • Condensed-phase Optimized Molecular Potentials for Atomistic Simulation Studies (COMPASS), force field potential software, Accelrys Inc., USA.
  • 37
    • 0347803910 scopus 로고    scopus 로고
    • Software Program, Cray Research Inc., and Oxford Molecular, UK
    • UniChem, Software Program, Cray Research Inc., and Oxford Molecular, UK.
    • UniChem
  • 41
    • 0345912585 scopus 로고    scopus 로고
    • Endeasd Report
    • A. Resende, Endeasd Report, p. 1 (1999).
    • (1999) , pp. 1
    • Resende, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.