SCOPUS 정보 검색 플랫폼

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 1154-1162

Deposition of thick cubic boron nitride films: The route to practical applications

(7) Bello, I a Chan, C Y a Zhang, W J a Chong, Y M a Leung, K M a Lee, S T a Lifshitz, Y a,b

a CITY UNIVERSITY OF HONG KONG (Hong Kong)

b TECHNION ISRAEL INSTITUTE OF TECHNOLOGY (Israel)

Author keywords

Cubic boron nitride; Epitaxy; Physical vapor deposition; Plasma enhanced CVD

Indexed keywords

CUBIC BORON NITRIDE; EPITAXIAL GROWTH; HEAT TREATMENT; PHYSICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING; SINGLE CRYSTALS; STRESS ANALYSIS; TEMPERATURE DISTRIBUTION;

ATOMIC DENSITY; BAND GAP; BUFFER LAYERS; ION ENERGY;

THICK FILMS;

EID: 18544362516 PISSN: 09259635 EISSN: None Source Type: Journal
DOI: 10.1016/j.diamond.2004.12.041 Document Type: Conference Paper

Times cited : (45)

References (51)

1
- 0031339504
- P.B. Mirkarimi, K.F. McCarty, and D.L. Medlin Mater. Sci. Eng., R 21 1997 47 and the references herein
- (1997) Mater. Sci. Eng., R , vol.21 , pp. 47
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³

2
- 0013352703
- J. Liu, Y.K. Vohra, J.T. Tarvin, and S.S. Vagarali Phys. Rev. B 51 1995 8591
- (1995) Phys. Rev. B , vol.51 , pp. 8591
- Liu, J.¹ Vohra, Y.K.² Tarvin, J.T.³ Vagarali, S.S.⁴

3
- 0000742072
- D.R. McKenzie, W.G. Sainty, and D. Green Mater. Sci. Forum 54/55 1990 193
- (1990) Mater. Sci. Forum , vol.54-55 , pp. 193
- McKenzie, D.R.¹ Sainty, W.G.² Green, D.³

4
- 0000017170
- N. Miyata, and K. Moriki Phys. Rev. B 40 1989 12028
- (1989) Phys. Rev. B , vol.40 , pp. 12028
- Miyata, N.¹ Moriki, K.²

5
- 0023649268
- O. Mishima, J. Tanaka, S. Yamaoka, and O. Fukunaga Science 238 1987 181
- (1987) Science , vol.238 , pp. 181
- Mishima, O.¹ Tanaka, J.² Yamaoka, S.³ Fukunaga, O.⁴

6
- 0036467042
- S.N. Mohammad Solid State Electron. 46 2002 203
- (2002) Solid State Electron. , vol.46 , pp. 203
- Mohammad, S.N.¹

7
- 0031211578
- P.B. Mirkarimi, D.L. Medlin, K.F. McCarty, D.C. Dibble, W.M. Clift, J.A. Knapp, and J.C. Barbour J. Appl. Phys. 82 1997 1617
- (1997) J. Appl. Phys. , vol.82 , pp. 1617
- Mirkarimi, P.B.¹ Medlin, D.L.² McCarty, K.F.³ Dibble, D.C.⁴ Clift, W.M.⁵ Knapp, J.A.⁶ Barbour, J.C.⁷

8
- 36448999062
- D.J. Kester, and R. Messier J. Appl. Phys. 72 1992 504
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester, D.J.¹ Messier, R.²

9
- 0002879173
- H. Hofsäss, C. Ronning, U. Griesmeier, M. Gross, S. Reinke, and M. Kuhr Appl. Phys. Lett. 67 1995 46
- (1995) Appl. Phys. Lett. , vol.67 , pp. 46
- Hofsäss, H.¹ Ronning, C.² Griesmeier, U.³ Gross, M.⁴ Reinke, S.⁵ Kuhr, M.⁶

10
- 0000284668
- S. Ulrich, J. Scherer, J. Schwan, I. Barzen, K. Jung, M. Scheib, and H. Ehrhardt Appl. Phys. Lett. 68 1996 909
- (1996) Appl. Phys. Lett. , vol.68 , pp. 909
- Ulrich, S.¹ Scherer, J.² Schwan, J.³ Barzen, I.⁴ Jung, K.⁵ Scheib, M.⁶ Ehrhardt, H.⁷

11
- 30244511194
- J. Hahn, M. Friedrich, R. Pintaske, M. Schaller, N. Kahl, D.R.T. Zahn, and F. Richter Diamond Relat. Mater. 5 1996 1103
- (1996) Diamond Relat. Mater. , vol.5 , pp. 1103
- Hahn, J.¹ Friedrich, M.² Pintaske, R.³ Schaller, M.⁴ Kahl, N.⁵ Zahn, D.R.T.⁶ Richter, F.⁷

12
- 0000623285
- T. Yoshida Diamond Relat. Mater. 5 1996 501 and the references therein
- (1996) Diamond Relat. Mater. , vol.5 , pp. 501
- Yoshida, T.¹

13
- 0033355910
- A. Klett, R. Freudenstein, M.F. Plass, and W. Kulisch Surf. Coat. Technol. 116-119 1999 86
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 86
- Klett, A.¹ Freudenstein, R.² Plass, M.F.³ Kulisch, W.⁴

14
- 1642525519
- R. Haubner, M. Wilhem, R. Wessenbacher, and B. Lux Struct. Bonding 102 2002 1
- (2002) Struct. Bonding , vol.102 , pp. 1
- Haubner, R.¹ Wilhem, M.² Wessenbacher, R.³ Lux, B.⁴

15
- 0000302511
- J. Robertson Diamond Relat. Mater. 5 1996 519
- (1996) Diamond Relat. Mater. , vol.5 , pp. 519
- Robertson, J.¹

16
- 30244456854
- L.B. Hackenberger, L.J. Pilione, R. Messier, and G.P. Lamaze J. Vac. Sci. Technol., A 12 1994 1569
- (1994) J. Vac. Sci. Technol., A , vol.12 , pp. 1569
- Hackenberger, L.B.¹ Pilione, L.J.² Messier, R.³ Lamaze, G.P.⁴

17
- 0038509307
- H. Hofsäss, C. Ronning, U. Griemeier, M. Gross, S. Reinke, M. Huhr, J. Zweck, and R. Fischer Nucl. Instrum. Methods Phys. Res., Sect. B 105 1995 153
- (1995) Nucl. Instrum. Methods Phys. Res., Sect. B , vol.105 , pp. 153
- Hofsäss, H.¹ Ronning, C.² Griemeier, U.³ Gross, M.⁴ Reinke, S.⁵ Huhr, M.⁶ Zweck, J.⁷ Fischer, R.⁸

18
- 0037081480
- Q. Li, L.D. Marks, Y. Lifshitz, S.T. Lee, and I. Bello Phys. Rev. B 65 2002 045415
- (2002) Phys. Rev. B , vol.65 , pp. 045415
- Li, Q.¹ Marks, L.D.² Lifshitz, Y.³ Lee, S.T.⁴ Bello, I.⁵

19
- 0036645357
- Q. Li, R.Q. Zhang, L.D. Marks, and I. Bello Diamond Relat. Mater. 11 2002 1416
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1416
- Li, Q.¹ Zhang, R.Q.² Marks, L.D.³ Bello, I.⁴

20
- 0001249638
- S. Ulrich, J. Schwan, W. Donner, and H. Ehrhardt Diamond Relat. Mater. 5 1996 548
- (1996) Diamond Relat. Mater. , vol.5 , pp. 548
- Ulrich, S.¹ Schwan, J.² Donner, W.³ Ehrhardt, H.⁴

21
- 0030408643
- I.H. Kim, K.S. Kim, S.H. Kim, and S.R. Lee Thin Solid Films 290-291 1996 120
- (1996) Thin Solid Films , vol.290-291 , pp. 120
- Kim, I.H.¹ Kim, K.S.² Kim, S.H.³ Lee, S.R.⁴

22
- 0000989867
- W. Donner, H. Dosch, S. Ulrich, H. Ehrhardt, and D. Abernathy Appl. Phys. Lett. 73 1998 777
- (1998) Appl. Phys. Lett. , vol.73 , pp. 777
- Donner, W.¹ Dosch, H.² Ulrich, S.³ Ehrhardt, H.⁴ Abernathy, D.⁵

23
- 0035876520
- C. Fitz, A. Kolitsch, and W. Fukarek Thin Solid Films 389 2001 173
- (2001) Thin Solid Films , vol.389 , pp. 173
- Fitz, C.¹ Kolitsch, A.² Fukarek, W.³

24
- 2442560204
- H. Hofsäss, S. Eyhusen, and C. Ronning Diamond Relat. Mater. 13 2004 1103
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1103
- Hofsäss, H.¹ Eyhusen, S.² Ronning, C.³

25
- 0001627483
- P. Widmayer, P. Ziemann, S. Ulrich, and H. Ehrhardt Diamond Relat. Mater. 6 1997 621
- (1997) Diamond Relat. Mater. , vol.6 , pp. 621
- Widmayer, P.¹ Ziemann, P.² Ulrich, S.³ Ehrhardt, H.⁴

26
- 79956017369
- C. Fitz, A. Kolitsch, W. Möller, and W. Fukarek Appl. Phys. Lett. 80 2002 55
- (2002) Appl. Phys. Lett. , vol.80 , pp. 55
- Fitz, C.¹ Kolitsch, A.² Möller, W.³ Fukarek, W.⁴

27
- 0000914471
- J. Ullmann, J.E.E. Baglin, and A.J. Kellock J. Appl. Phys. 83 1998 2980
- (1998) J. Appl. Phys. , vol.83 , pp. 2980
- Ullmann, J.¹ Baglin, J.E.E.² Kellock, A.J.³

28
- 0032674370
- J. Ullmann, A.J. Kellock, and J.E.E. Baglin Thin Solid Films 341 1999 238
- (1999) Thin Solid Films , vol.341 , pp. 238
- Ullmann, J.¹ Kellock, A.J.² Baglin, J.E.E.³

29
- 0000607634
- D. Litvinov, and R. Clarke Appl. Phys. Lett. 71 1997 1969
- (1997) Appl. Phys. Lett. , vol.71 , pp. 1969
- Litvinov, D.¹ Clarke, R.²

30
- 0000522367
- D. Litvinov, and R. Clarke Appl. Phys. Lett. 74 1999 955
- (1999) Appl. Phys. Lett. , vol.74 , pp. 955
- Litvinov, D.¹ Clarke, R.²

31
- 0000109524
- H. Feldermann, R. Merk, H. Hofsäss, C. Ronning, and T. Zheleva Appl. Phys. Lett. 74 1999 1552
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1552
- Feldermann, H.¹ Merk, R.² Hofsäss, H.³ Ronning, C.⁴ Zheleva, T.⁵

32
- 0035476397
- H. Felderman, C. Ronning, H. Hofsäss, Y.L. Huang, and M. Seibt J. Appl. Phys. 90 2001 3248
- (2001) J. Appl. Phys. , vol.90 , pp. 3248
- Felderman, H.¹ Ronning, C.² Hofsäss, H.³ Huang, Y.L.⁴ Seibt, M.⁵

33
- 0034516698
- K. Yamamoto, M. Keunecke, and K. Bewilogua Thin Solid Films 377-378 2000 331
- (2000) Thin Solid Films , vol.377-378 , pp. 331
- Yamamoto, K.¹ Keunecke, M.² Bewilogua, K.³

34
- 18544386397
- K. Bewilogua, M. Keunecke, K. Weigel, and E. Wiemann Thin Solid Films 86-91 2004 8691
- (2004) Thin Solid Films , vol.86-91 , pp. 8691
- Bewilogua, K.¹ Keunecke, M.² Weigel, K.³ Wiemann, E.⁴

35
- 2442495119
- X.W. Zhang, H.-G. Boyen, P. Ziemann, M. Ozawa, F. Banhart, and M. Schreck Diamond Relat. Mater. 13 2004 1144
- (2004) Diamond Relat. Mater. , vol.13 , pp. 1144
- Zhang, X.W.¹ Boyen, H.-G.² Ziemann, P.³ Ozawa, M.⁴ Banhart, F.⁵ Schreck, M.⁶

36
- 0000972721
- D.H. Berns, and M.A. Cappelli Appl. Phys. Lett. 68 1996 2711
- (1996) Appl. Phys. Lett. , vol.68 , pp. 2711
- Berns, D.H.¹ Cappelli, M.A.²

37
- 0033707202
- S. Matsumoto, and W.J. Zhang Jpn. J. Appl. Phys. 39 2000 L442
- (2000) Jpn. J. Appl. Phys. , vol.39
- Matsumoto, S.¹ Zhang, W.J.²

38
- 0037390571
- W.J. Zhang, C.Y. Chan, K.M. Chan, I. Bello, Y. Lifshitz, and S.T. Lee Appl. Phys. A 76 2003 953
- (2003) Appl. Phys. A , vol.76 , pp. 953
- Zhang, W.J.¹ Chan, C.Y.² Chan, K.M.³ Bello, I.⁴ Lifshitz, Y.⁵ Lee, S.T.⁶

39
- 0034288096
- W.J. Zhang, and S. Matsumoto Appl. Phys. A 71 2000 469
- (2000) Appl. Phys. A , vol.71 , pp. 469
- Zhang, W.J.¹ Matsumoto, S.²

40
- 0035981088
- W.J. Zhang, X. Jiang, and S. Matsumoto Appl. Phys. Lett. 79 2001 4530
- (2001) Appl. Phys. Lett. , vol.79 , pp. 4530
- Zhang, W.J.¹ Jiang, X.² Matsumoto, S.³

41
- 0035105354
- W.J. Zhang, and S. Matsumoto Phys. Rev. B 63 2001 73201
- (2001) Phys. Rev. B , vol.63 , pp. 73201
- Zhang, W.J.¹ Matsumoto, S.²

42
- 0035449210
- W.J. Zhang, S. Matsumoto, K. Kurashima, and Y. Bando Diamond Relat. Mater. 10 2001 1881
- (2001) Diamond Relat. Mater. , vol.10 , pp. 1881
- Zhang, W.J.¹ Matsumoto, S.² Kurashima, K.³ Bando, Y.⁴

43
- 0036539747
- W.J. Zhang, S. Matsumoto, Q. Li, I. Bello, and S.T. Lee Adv. Funct. Mater. 12 2002 250
- (2002) Adv. Funct. Mater. , vol.12 , pp. 250
- Zhang, W.J.¹ Matsumoto, S.² Li, Q.³ Bello, I.⁴ Lee, S.T.⁵

44
- 0037508553
- C.Y. Chan, W.J. Zhang, X.M. Meng, K.M. Chan, I. Bello, Y. Lifshitz, and S.T. Lee Diamond Relat. Mater. 12 2003 1162
- (2003) Diamond Relat. Mater. , vol.12 , pp. 1162
- Chan, C.Y.¹ Zhang, W.J.² Meng, X.M.³ Chan, K.M.⁴ Bello, I.⁵ Lifshitz, Y.⁶ Lee, S.T.⁷

45
- 10644283901
- C.Y. Chan, W.J. Zhang, X.M. Meng, K.M. Chan, I. Bello, Y. Lifshitz, and S.T. Lee Chem. Vap. Deposition 9 2003 181
- (2003) Chem. Vap. Deposition , vol.9 , pp. 181
- Chan, C.Y.¹ Zhang, W.J.² Meng, X.M.³ Chan, K.M.⁴ Bello, I.⁵ Lifshitz, Y.⁶ Lee, S.T.⁷

46
- 0037155436
- H. Yang, C. Iwamoto, and T. Yoshida Thin Solid Films 407 2002 67
- (2002) Thin Solid Films , vol.407 , pp. 67
- Yang, H.¹ Iwamoto, C.² Yoshida, T.³

47
- 0030105252
- N.M. Hwang, J.H. Hahn, and D.Y. Yoon J. Cryst. Growth 160 1996 87
- (1996) J. Cryst. Growth , vol.160 , pp. 87
- Hwang, N.M.¹ Hahn, J.H.² Yoon, D.Y.³

48
- 0001569483
- Y.N. Xu, and W.Y. Ching Phys. Rev. B 44 1991 7787
- (1991) Phys. Rev. B , vol.44 , pp. 7787
- Xu, Y.N.¹ Ching, W.Y.²

49
- 4544234444
- W.J. Zhang, I. Bello, Y. Lifshitz, K.M. Chan, Y. Wu, C.Y. Chan, X.M. Meng, and S.T. Lee Appl. Phys. Lett. 85 2004 1344
- (2004) Appl. Phys. Lett. , vol.85 , pp. 1344
- Zhang, W.J.¹ Bello, I.² Lifshitz, Y.³ Chan, K.M.⁴ Wu, Y.⁵ Chan, C.Y.⁶ Meng, X.M.⁷ Lee, S.T.⁸

50
- 0037212073
- C.Y. Chan, W.J. Zhang, S. Matsumoto, I. Bello, and S.T. Lee J. Cryst. Growth 247 2003 438
- (2003) J. Cryst. Growth , vol.247 , pp. 438
- Chan, C.Y.¹ Zhang, W.J.² Matsumoto, S.³ Bello, I.⁴ Lee, S.T.⁵

51
- 19444367304
- W.J. Zhang, I. Bello, Y. Lifshitz, K.M. Chan, X.M. Meng, Y. Wu, C.Y. Chan, and S.T. Lee Adv. Mater. 16 2004 1405
- (2004) Adv. Mater. , vol.16 , pp. 1405
- Zhang, W.J.¹ Bello, I.² Lifshitz, Y.³ Chan, K.M.⁴ Meng, X.M.⁵ Wu, Y.⁶ Chan, C.Y.⁷ Lee, S.T.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.